JPS51117568A - Electron gun for use in electron microscope - Google Patents

Electron gun for use in electron microscope

Info

Publication number
JPS51117568A
JPS51117568A JP4133975A JP4133975A JPS51117568A JP S51117568 A JPS51117568 A JP S51117568A JP 4133975 A JP4133975 A JP 4133975A JP 4133975 A JP4133975 A JP 4133975A JP S51117568 A JPS51117568 A JP S51117568A
Authority
JP
Japan
Prior art keywords
electron
gun
electron microscope
microscope
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4133975A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Yoshihisa Namikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4133975A priority Critical patent/JPS51117568A/en
Publication of JPS51117568A publication Critical patent/JPS51117568A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To prevent the luminance from decreasing when an accelaration voltage is changed.
COPYRIGHT: (C)1976,JPO&Japio
JP4133975A 1975-04-07 1975-04-07 Electron gun for use in electron microscope Pending JPS51117568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4133975A JPS51117568A (en) 1975-04-07 1975-04-07 Electron gun for use in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4133975A JPS51117568A (en) 1975-04-07 1975-04-07 Electron gun for use in electron microscope

Publications (1)

Publication Number Publication Date
JPS51117568A true JPS51117568A (en) 1976-10-15

Family

ID=12605749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4133975A Pending JPS51117568A (en) 1975-04-07 1975-04-07 Electron gun for use in electron microscope

Country Status (1)

Country Link
JP (1) JPS51117568A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61139561U (en) * 1985-02-19 1986-08-29
JPS62243232A (en) * 1986-04-14 1987-10-23 Jeol Ltd Focusing ion beam device
JPS6381743A (en) * 1986-09-26 1988-04-12 Jeol Ltd Electric field emission type electron gun

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61139561U (en) * 1985-02-19 1986-08-29
JPS62243232A (en) * 1986-04-14 1987-10-23 Jeol Ltd Focusing ion beam device
JPS6381743A (en) * 1986-09-26 1988-04-12 Jeol Ltd Electric field emission type electron gun
JPH0530015B2 (en) * 1986-09-26 1993-05-07 Nippon Electron Optics Lab

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