JPS61139561U - - Google Patents

Info

Publication number
JPS61139561U
JPS61139561U JP2278585U JP2278585U JPS61139561U JP S61139561 U JPS61139561 U JP S61139561U JP 2278585 U JP2278585 U JP 2278585U JP 2278585 U JP2278585 U JP 2278585U JP S61139561 U JPS61139561 U JP S61139561U
Authority
JP
Japan
Prior art keywords
charged particle
particle generator
stages
anodes
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2278585U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2278585U priority Critical patent/JPS61139561U/ja
Publication of JPS61139561U publication Critical patent/JPS61139561U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す構成図、第２
図は従来装置の構成例を示す図である。 ２……ウエーネルト電極、３……フイラメント
、７……インシユレータ、８……フープ、９……
ケース、１０……高圧絶縁部、１１，１２……接
地棒、６１〜６６……アノード、Ｒ１〜Ｒ６……
抵抗。 Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a diagram showing an example of the configuration of a conventional device. 2... Wehnelt electrode, 3... filament, 7... insulator, 8... hoop, 9...
Case, 10...High voltage insulation section, 11, 12...Ground rod, 61-66...Anode, R1 - R6 ...
resistance.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 発生した電子を複数個のアノードによつて多段
加速するように構成された荷電粒子発生装置にお
いて、加速分割段数をコントロールする接地手段
を設けたことを特徴とする荷電粒子発生装置。 A charged particle generator configured to accelerate generated electrons in multiple stages using a plurality of anodes, characterized in that the charged particle generator is provided with grounding means for controlling the number of acceleration division stages.
JP2278585U 1985-02-19 1985-02-19 Pending JPS61139561U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2278585U JPS61139561U (en) 1985-02-19 1985-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2278585U JPS61139561U (en) 1985-02-19 1985-02-19

Publications (1)

Publication Number Publication Date
JPS61139561U true JPS61139561U (en) 1986-08-29

Family

ID=30515407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2278585U Pending JPS61139561U (en) 1985-02-19 1985-02-19

Country Status (1)

Country Link
JP (1) JPS61139561U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03101040A (en) * 1989-09-13 1991-04-25 Jeol Ltd Electrode short-circuiting mechanism

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117568A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Electron gun for use in electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51117568A (en) * 1975-04-07 1976-10-15 Hitachi Ltd Electron gun for use in electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03101040A (en) * 1989-09-13 1991-04-25 Jeol Ltd Electrode short-circuiting mechanism

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