JPS642352U - - Google Patents
Info
- Publication number
- JPS642352U JPS642352U JP9658487U JP9658487U JPS642352U JP S642352 U JPS642352 U JP S642352U JP 9658487 U JP9658487 U JP 9658487U JP 9658487 U JP9658487 U JP 9658487U JP S642352 U JPS642352 U JP S642352U
- Authority
- JP
- Japan
- Prior art keywords
- electron gun
- filament
- field emission
- group
- emission type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 2
Description
図面は本考案の一実施例を示す電界放射形電子
銃の断面図である。
１……第１アノード、２……第２アノード、３
……フイラメント、４……ガス吸着部材。
The drawing is a sectional view of a field emission type electron gun showing an embodiment of the present invention. 1...First anode, 2...Second anode, 3
...Filament, 4...Gas adsorption member.
Claims (1)
第２アノードとフイラメントとの間に高電圧を印
加してフイラメントから電子を放射させる電界放
射形電子銃において、上記電子銃室の内部に第４
族または第５族の元素を少なくとも１種類含むガ
ス吸着部材を設けたことを特徴とする電界放射形
電子銃。 In a field emission type electron gun in which electrons are emitted from the filament by applying a high voltage between the filament and the first and second anodes in the electron gun chamber in a high vacuum, a fourth anode is placed inside the electron gun chamber.
A field emission type electron gun characterized in that it is provided with a gas adsorption member containing at least one kind of element of Group 5 or Group 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9658487U JPS642352U (en) | 1987-06-25 | 1987-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9658487U JPS642352U (en) | 1987-06-25 | 1987-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642352U true JPS642352U (en) | 1989-01-09 |
Family
ID=30962478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9658487U Pending JPS642352U (en) | 1987-06-25 | 1987-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642352U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023203755A1 (en) * | 2022-04-22 | 2023-10-26 | 株式会社日立ハイテク | Charged particle beam device |
-
1987
- 1987-06-25 JP JP9658487U patent/JPS642352U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023203755A1 (en) * | 2022-04-22 | 2023-10-26 | 株式会社日立ハイテク | Charged particle beam device |