JPH0261045U - - Google Patents
Info
- Publication number
- JPH0261045U JPH0261045U JP14063788U JP14063788U JPH0261045U JP H0261045 U JPH0261045 U JP H0261045U JP 14063788 U JP14063788 U JP 14063788U JP 14063788 U JP14063788 U JP 14063788U JP H0261045 U JPH0261045 U JP H0261045U
- Authority
- JP
- Japan
- Prior art keywords
- pillars
- grid
- filament
- thermionic emission
- pillar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例の概略図、第２図及
び第３図はその詳細部分を説明するための図、第
４図及び第５図は従来例を説明するための図であ
る。
１１：形成された支持固定用部材、１２：熱電
子放出用フイラメント、１３ａ，１３ｂ……：支
持棒、１４：フツク。
FIG. 1 is a schematic diagram of an embodiment of the present invention, FIGS. 2 and 3 are diagrams for explaining its detailed parts, and FIGS. 4 and 5 are diagrams for explaining a conventional example. . 11: Formed supporting and fixing member, 12: Thermionic emission filament, 13a, 13b...: Support rod, 14: Hook.
Claims (1)
たれた熱電子放出用フイラメントと、電子衝撃電
離作用によつて前記グリツドで囲まれた空間に生
成されたプラズマから引き出し電極によつて正イ
オンを取り出すようにしたイオン源において、前
記熱電子放出用フイラメントを支えるための少な
くとも３本の支柱と、該支柱の各々に固定された
フツクを備え、前記熱電子放出用フイラメントを
形成する線材を前記各支柱のフツクに巻き付けて
各支柱により支持したことを特徴とする電子衝撃
型イオン源。 A grid, a filament for emitting thermionic electrons maintained at a negative potential with respect to the grid, and an extraction electrode to extract positive ions from the plasma generated in the space surrounded by the grid by electron impact ionization. The ion source configured to take out the thermionic emission filament is provided with at least three pillars for supporting the thermionic emission filament, and a hook fixed to each of the pillars, and the wire forming the thermionic emission filament is attached to each of the three pillars. An electron impact ion source characterized by being wrapped around the hook of a pillar and supported by each pillar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14063788U JPH0261045U (en) | 1988-10-28 | 1988-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14063788U JPH0261045U (en) | 1988-10-28 | 1988-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261045U true JPH0261045U (en) | 1990-05-07 |
Family
ID=31404993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14063788U Pending JPH0261045U (en) | 1988-10-28 | 1988-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261045U (en) |
-
1988
- 1988-10-28 JP JP14063788U patent/JPH0261045U/ja active Pending