JPS63150455U - - Google Patents
Info
- Publication number
- JPS63150455U JPS63150455U JP4251187U JP4251187U JPS63150455U JP S63150455 U JPS63150455 U JP S63150455U JP 4251187 U JP4251187 U JP 4251187U JP 4251187 U JP4251187 U JP 4251187U JP S63150455 U JPS63150455 U JP S63150455U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- insulator
- ion source
- plasma generation
- generation container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第1図は、この考案の一実施例に係るイオン源
のプラズマ生成容器回りを拡大して部分的に示す
概略断面図である。第2図は、従来のイオン源の
一例を示す概略断面図である。
6……フイラメント、12……イオンビーム、
15……プラズマ生成容器、17a,17b……
絶縁物。
FIG. 1 is an enlarged schematic cross-sectional view partially showing the vicinity of a plasma generation container of an ion source according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing an example of a conventional ion source. 6...Filament, 12...Ion beam,
15... Plasma generation container, 17a, 17b...
Insulator.
Claims (1)
としてのフイラメントが貫通した構造のイオン源
において、前記プラズマ生成容器のフイラメント
が貫通する側の壁面自体の少なくとも一部分を絶
縁物で構成し、その絶縁物をフイラメントが貫通
していることを特徴とするイオン源。 In an ion source having a structure in which a filament as a cathode penetrates a plasma generation container that also serves as an anode, at least a portion of the wall surface of the plasma generation container on the side through which the filament passes is made of an insulator, and the filament passes through the insulator. An ion source characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4251187U JPS63150455U (en) | 1987-03-23 | 1987-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4251187U JPS63150455U (en) | 1987-03-23 | 1987-03-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63150455U true JPS63150455U (en) | 1988-10-04 |
Family
ID=30858493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4251187U Pending JPS63150455U (en) | 1987-03-23 | 1987-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63150455U (en) |
-
1987
- 1987-03-23 JP JP4251187U patent/JPS63150455U/ja active Pending