JPS6296255U - - Google Patents
Info
- Publication number
- JPS6296255U JPS6296255U JP18719885U JP18719885U JPS6296255U JP S6296255 U JPS6296255 U JP S6296255U JP 18719885 U JP18719885 U JP 18719885U JP 18719885 U JP18719885 U JP 18719885U JP S6296255 U JPS6296255 U JP S6296255U
- Authority
- JP
- Japan
- Prior art keywords
- anode
- hole
- ion gun
- cathode
- extracting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第1図は本考案の高真空イオンガンの実施例の
断面図である。
1…真空排気ポンプ、2…真空チヤンバー、3
…イオンガンボデイ、4…絶縁物、5…アノード
。
FIG. 1 is a sectional view of an embodiment of the high vacuum ion gun of the present invention. 1... Vacuum exhaust pump, 2... Vacuum chamber, 3
...Ion gun body, 4...Insulator, 5...Anode.
Claims (1)
物と、前記アノードに対向しているカソードから
成るイオンガンにおいて、カソードに設けてある
イオンビーム取出し用の孔の長さが孔直径の2倍
以上あることを特徴とする高真空イオンガン。 In an ion gun consisting of an anode, an insulator covering the anode, and a cathode facing the anode, the length of the hole for extracting the ion beam provided in the cathode must be at least twice the diameter of the hole. High vacuum ion gun with special features.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18719885U JPS6296255U (en) | 1985-12-06 | 1985-12-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18719885U JPS6296255U (en) | 1985-12-06 | 1985-12-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6296255U true JPS6296255U (en) | 1987-06-19 |
Family
ID=31137454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18719885U Pending JPS6296255U (en) | 1985-12-06 | 1985-12-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6296255U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016051441A1 (en) * | 2014-09-29 | 2016-04-07 | 株式会社日立製作所 | Ion beam device and sample observation method |
-
1985
- 1985-12-06 JP JP18719885U patent/JPS6296255U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016051441A1 (en) * | 2014-09-29 | 2016-04-07 | 株式会社日立製作所 | Ion beam device and sample observation method |
JPWO2016051441A1 (en) * | 2014-09-29 | 2017-08-10 | 株式会社日立製作所 | Ion beam apparatus and sample observation method |
US10340117B2 (en) | 2014-09-29 | 2019-07-02 | Hitachi, Ltd. | Ion beam device and sample observation method |