JPS6347570U - - Google Patents
Info
- Publication number
- JPS6347570U JPS6347570U JP14202986U JP14202986U JPS6347570U JP S6347570 U JPS6347570 U JP S6347570U JP 14202986 U JP14202986 U JP 14202986U JP 14202986 U JP14202986 U JP 14202986U JP S6347570 U JPS6347570 U JP S6347570U
- Authority
- JP
- Japan
- Prior art keywords
- wehnelt electrode
- main
- wehnelt
- electron beam
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図は従来例の断面図、第３図は別の従来例を示
す断面図である。
１…陰極、２…ウエーネルト電極、３…アノー
ド電極、４…電子ビーム、６…主ウエーネルト電
極、７…補助ウエーネルト電極。
FIG. 1 is a sectional view showing an embodiment of this invention, FIG. 2 is a sectional view of a conventional example, and FIG. 3 is a sectional view of another conventional example. DESCRIPTION OF SYMBOLS 1...Cathode, 2...Wehnelt electrode, 3...Anode electrode, 4...Electron beam, 6...Main Wehnelt electrode, 7...Auxiliary Wehnelt electrode.
Claims (1)
備えた電子銃を有する電子線照射装置において、
前記ウエーネルト電極を、前記陰極からの電子ビ
ームの外側端に対して６７．５°（またはそれ以
下）の角度で傾斜する面を持つ主ウエーネルト電
極と、前記主ウエーネルト電極の上面に配置され
てあつて、前記電子ビームの外側端に対して９０
°の角度で傾斜する面を持つ補助ウエーネルト電
極とによつて構成し、前記主ウエーネルト電極を
、前記補助ウエーネルト電極に対して、電子ビー
ムの進行方向と直交する方向に移動自在としてな
る電子線照射装置。 In an electron beam irradiation device having an electron gun equipped with a cathode, a Wehnelt electrode, and an anode electrode,
The Wehnelt electrodes include a main Wehnelt electrode having a surface inclined at an angle of 67.5° (or less) with respect to an outer edge of the electron beam from the cathode, and a main Wehnelt electrode disposed on an upper surface of the main Wehnelt electrode. and 90° to the outer edge of the electron beam.
an auxiliary Wehnelt electrode having a surface inclined at an angle of .degree., the main Wehnelt electrode being movable relative to the auxiliary Wehnelt electrode in a direction perpendicular to the traveling direction of the electron beam. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14202986U JPS6347570U (en) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14202986U JPS6347570U (en) | 1986-09-16 | 1986-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6347570U true JPS6347570U (en) | 1988-03-31 |
Family
ID=31050369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14202986U Pending JPS6347570U (en) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347570U (en) |
-
1986
- 1986-09-16 JP JP14202986U patent/JPS6347570U/ja active Pending