JPH0231055U - - Google Patents
Info
- Publication number
- JPH0231055U JPH0231055U JP10989388U JP10989388U JPH0231055U JP H0231055 U JPH0231055 U JP H0231055U JP 10989388 U JP10989388 U JP 10989388U JP 10989388 U JP10989388 U JP 10989388U JP H0231055 U JPH0231055 U JP H0231055U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- anode
- electrode system
- drive mechanism
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 230000009977 dual effect Effects 0.000 description 2
- 238000004157 plasmatron Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るデユオプ
ラズマトロン型のイオン源を示す断面図である。
第２図は、第１図の電極駆動機構の詳細例を示す
図である。第３図は、従来のデユオプラズマトロ
ン型のイオン源の一例を示す断面図である。
４……陰極、８……中間電極、１２……陽極、
１４……引出し電極系、１６……抑制電極、１８
……接地電極、２２……イオンビーム、２６……
電極駆動機構、２８……電極支持軸。
FIG. 1 is a sectional view showing a dual plasmatron type ion source according to an embodiment of the invention.
FIG. 2 is a diagram showing a detailed example of the electrode drive mechanism shown in FIG. 1. FIG. 3 is a cross-sectional view showing an example of a conventional dual plasmatron type ion source. 4...Cathode, 8...Intermediate electrode, 12...Anode,
14...Extraction electrode system, 16...Suppression electrode, 18
...Ground electrode, 22...Ion beam, 26...
Electrode drive mechanism, 28...electrode support shaft.
Claims (1)
および陽極の下流側に配置された引出し電極系を
有するイオン源において、前記引出し電極系を機
械的に駆動する電極駆動機構であつて、少なくと
も引出し電極系と陽極との間の電極間隔を調整可
能なものを設けたことを特徴とするイオン源。 In an ion source having a cathode, an anode, an intermediate electrode disposed between the two, and an extraction electrode system disposed downstream of the anode, an electrode drive mechanism for mechanically driving the extraction electrode system, the electrode drive mechanism including at least one extraction electrode system. An ion source characterized by having an adjustable electrode spacing between an electrode system and an anode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988109893U JPH0635363Y2 (en) | 1988-08-22 | 1988-08-22 | Ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988109893U JPH0635363Y2 (en) | 1988-08-22 | 1988-08-22 | Ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0231055U true JPH0231055U (en) | 1990-02-27 |
| JPH0635363Y2 JPH0635363Y2 (en) | 1994-09-14 |
Family
ID=31346557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988109893U Expired - Lifetime JPH0635363Y2 (en) | 1988-08-22 | 1988-08-22 | Ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0635363Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10508425A (en) * | 1995-07-21 | 1998-08-18 | アプライド マテリアルズ インコーポレイテッド | Ion beam equipment |
| JP2003503819A (en) * | 1999-06-23 | 2003-01-28 | アプライド マテリアルズ インコーポレイテッド | Ion beam generator |
| CN112652509A (en) * | 2020-12-31 | 2021-04-13 | 南京大学 | Extraction electrode for extracting 65KeV double plasma ion source protons |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5882447A (en) * | 1981-11-11 | 1983-05-18 | Ulvac Corp | Electrodes distance controller of lead-out electrode in ion source |
-
1988
- 1988-08-22 JP JP1988109893U patent/JPH0635363Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5882447A (en) * | 1981-11-11 | 1983-05-18 | Ulvac Corp | Electrodes distance controller of lead-out electrode in ion source |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10508425A (en) * | 1995-07-21 | 1998-08-18 | アプライド マテリアルズ インコーポレイテッド | Ion beam equipment |
| JP2003503819A (en) * | 1999-06-23 | 2003-01-28 | アプライド マテリアルズ インコーポレイテッド | Ion beam generator |
| CN112652509A (en) * | 2020-12-31 | 2021-04-13 | 南京大学 | Extraction electrode for extracting 65KeV double plasma ion source protons |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635363Y2 (en) | 1994-09-14 |