JPS6436956U - - Google Patents
Info
- Publication number
- JPS6436956U JPS6436956U JP13200887U JP13200887U JPS6436956U JP S6436956 U JPS6436956 U JP S6436956U JP 13200887 U JP13200887 U JP 13200887U JP 13200887 U JP13200887 U JP 13200887U JP S6436956 U JPS6436956 U JP S6436956U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- discharge chamber
- source device
- rotatably supported
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案の実施例を示す断面図、第２
図はこの考案の他の実施例を示す断面図、第３図
は引出電極の平面図、第４図は従来例の断面図で
ある。
１……放電室、６，６Ａ，６Ｂ……引出電極、
７，７Ａ，７Ｂ……多孔部、８，８Ａ，８Ｂ……
回転軸。
Figure 1 is a sectional view showing an embodiment of this invention, Figure 2 is a sectional view showing an embodiment of this invention.
The figure is a sectional view showing another embodiment of this invention, FIG. 3 is a plan view of an extraction electrode, and FIG. 4 is a sectional view of a conventional example. 1... Discharge chamber, 6, 6A, 6B... Extraction electrode,
7, 7A, 7B... Porous part, 8, 8A, 8B...
Axis of rotation.
Claims (1)
記放電室よりイオンビームを引出すための多孔部
を有する引出電極とを備えたイオン源装置におい
て、前記引出電極を回動自在に支持するとともに
、前記引出電極の多孔部を複数とし、前記引出電
極を回動によつて、前記各多孔部を前記放電室の
引出電極位置に移動自在としてなるイオン源装置
。 In an ion source device comprising a discharge chamber for generating plasma therein, and an extraction electrode having a porous portion for extracting an ion beam from the discharge chamber, the extraction electrode is rotatably supported, and the extraction electrode is rotatably supported. An ion source device in which an extraction electrode has a plurality of porous portions, and each of the porous portions is movable to a position of the extraction electrode in the discharge chamber by rotating the extraction electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13200887U JPS6436956U (en) | 1987-08-29 | 1987-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13200887U JPS6436956U (en) | 1987-08-29 | 1987-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6436956U true JPS6436956U (en) | 1989-03-06 |
Family
ID=31388586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13200887U Pending JPS6436956U (en) | 1987-08-29 | 1987-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6436956U (en) |
-
1987
- 1987-08-29 JP JP13200887U patent/JPS6436956U/ja active Pending