JPS61199039U - - Google Patents
Info
- Publication number
- JPS61199039U JPS61199039U JP8323485U JP8323485U JPS61199039U JP S61199039 U JPS61199039 U JP S61199039U JP 8323485 U JP8323485 U JP 8323485U JP 8323485 U JP8323485 U JP 8323485U JP S61199039 U JPS61199039 U JP S61199039U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- etching apparatus
- plasma dry
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図はこの考案の一実施例によるプラズマド
ライエツチング装置の反応室周辺の断面側面図、
第２図は従来のプラズマドライエツチング装置の
断面側面図である。
２……下部電極、３……下部電極支持台、４…
…チヤンバー、５……チヤンバー支持台、６……
上部電極。なお、図中同一符号は同一又は相当部
分を示す。
FIG. 1 is a cross-sectional side view of the vicinity of the reaction chamber of a plasma dry etching apparatus according to an embodiment of this invention;
FIG. 2 is a cross-sectional side view of a conventional plasma dry etching apparatus. 2... Lower electrode, 3... Lower electrode support, 4...
...Chamber, 5...Chamber support stand, 6...
Upper electrode. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
ング装置において、その上部電極の下面の構造を
略半球凹状にしたことを特徴とするプラズマドラ
イエツチング装置。 A plasma dry etching apparatus having a parallel plate electrode structure, characterized in that the lower surface of the upper electrode has a substantially hemispherical concave structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8323485U JPS61199039U (en) | 1985-05-31 | 1985-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8323485U JPS61199039U (en) | 1985-05-31 | 1985-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199039U true JPS61199039U (en) | 1986-12-12 |
Family
ID=30631675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8323485U Pending JPS61199039U (en) | 1985-05-31 | 1985-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199039U (en) |
-
1985
- 1985-05-31 JP JP8323485U patent/JPS61199039U/ja active Pending