JPS61177448U - - Google Patents
Info
- Publication number
- JPS61177448U JPS61177448U JP6024785U JP6024785U JPS61177448U JP S61177448 U JPS61177448 U JP S61177448U JP 6024785 U JP6024785 U JP 6024785U JP 6024785 U JP6024785 U JP 6024785U JP S61177448 U JPS61177448 U JP S61177448U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holding
- holding device
- circumscribe
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図は、本考案の一実施例である試料保持装
置を示す断面図、第２図は、第１図のプラグの群
細図である。
１……基板、２……基板ホルダ、３……プラグ
、４……プラグ開閉器。
FIG. 1 is a sectional view showing a sample holding device which is an embodiment of the present invention, and FIG. 2 is a detailed view of the plug shown in FIG. 1. 1... Board, 2... Board holder, 3... Plug, 4... Plug switch.
Claims (1)
る試料保持装置において、前記試料外縁に外接す
るように配置し試料中心方向に弾性圧力を及ぼす
複数の支持プラグにより前記試料を支持すること
を特徴とする試料保持装置。 A sample holding device for holding a sample to be processed by a semiconductor manufacturing device, characterized in that the sample is supported by a plurality of support plugs that are arranged to circumscribe the outer edge of the sample and apply elastic pressure toward the center of the sample. holding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6024785U JPS61177448U (en) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6024785U JPS61177448U (en) | 1985-04-24 | 1985-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61177448U true JPS61177448U (en) | 1986-11-05 |
Family
ID=30587415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6024785U Pending JPS61177448U (en) | 1985-04-24 | 1985-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61177448U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922015A (en) * | 1982-07-27 | 1984-02-04 | Nippon Seimitsu Kogyo Kk | Focus adjusting device of ttl photometry system |
-
1985
- 1985-04-24 JP JP6024785U patent/JPS61177448U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922015A (en) * | 1982-07-27 | 1984-02-04 | Nippon Seimitsu Kogyo Kk | Focus adjusting device of ttl photometry system |
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