JPS62193661U - - Google Patents
Info
- Publication number
- JPS62193661U JPS62193661U JP8097286U JP8097286U JPS62193661U JP S62193661 U JPS62193661 U JP S62193661U JP 8097286 U JP8097286 U JP 8097286U JP 8097286 U JP8097286 U JP 8097286U JP S62193661 U JPS62193661 U JP S62193661U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- ion beam
- ion source
- ion
- insulating spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第1図は、本考案の一実施例の一部縦断面図で
ある。
6……永久磁石、7……プラズマ電極、8……
加速電極、9……接地電極、10……イオンビー
ム、11,12,14……絶縁スペーサ、13…
…支持フランジ、15……接地側フランジ、16
……衝立。
FIG. 1 is a partial vertical sectional view of an embodiment of the present invention. 6...Permanent magnet, 7...Plasma electrode, 8...
Accelerating electrode, 9... Ground electrode, 10... Ion beam, 11, 12, 14... Insulating spacer, 13...
...Support flange, 15...Ground side flange, 16
……screen.
Claims (1)
パチヤーと絶縁物スペーサを有するイオンビーム
引き出し電極を備えたイオン源において、引き出
し電極の周囲に、引き出し電極を囲む衝立を設け
たことを特徴とする大容量イオン源。 A large-capacity ion source comprising an ion beam extraction electrode having a plurality of apertures for extracting ions as an ion beam and an insulating spacer, the ion source comprising a screen surrounding the extraction electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8097286U JPS62193661U (en) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8097286U JPS62193661U (en) | 1986-05-30 | 1986-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62193661U true JPS62193661U (en) | 1987-12-09 |
Family
ID=30932275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8097286U Pending JPS62193661U (en) | 1986-05-30 | 1986-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62193661U (en) |
-
1986
- 1986-05-30 JP JP8097286U patent/JPS62193661U/ja active Pending