JPS6375936U - - Google Patents
Info
- Publication number
- JPS6375936U JPS6375936U JP16907686U JP16907686U JPS6375936U JP S6375936 U JPS6375936 U JP S6375936U JP 16907686 U JP16907686 U JP 16907686U JP 16907686 U JP16907686 U JP 16907686U JP S6375936 U JPS6375936 U JP S6375936U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma chamber
- ion source
- main insulator
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 230000001133 acceleration Effects 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例の横断面図である。
１……プラズマ室カバー、２……フイラメント
、３……電流導入端子、４……ガス導入口、５…
…プラズマ室ケース、６……加速電極、７……減
速電極、８……接地電極、９……主絶縁フランジ
、１０……永久磁石、１１……接地側フランジ、
１２……加速電流導入端子、１３……減速電流導
入端子、１４……Ｕ字形溝、１５……微少ギヤツ
プ。
FIG. 1 is a cross-sectional view of one embodiment of the present invention. 1... Plasma chamber cover, 2... Filament, 3... Current introduction terminal, 4... Gas inlet, 5...
...Plasma chamber case, 6... Acceleration electrode, 7... Deceleration electrode, 8... Ground electrode, 9... Main insulating flange, 10... Permanent magnet, 11... Ground side flange,
12...Acceleration current introduction terminal, 13...Deceleration current introduction terminal, 14...U-shaped groove, 15...Small gap.
Claims (1)
マ室よりイオンを引出すための複数の引出し電極
とを備えたイオン源において、真空容器の一部を
なし、前記プラズマ室を絶縁支持する主絶縁物に
前記複数個の電極を直接取付けられる取付面を設
けるとともに、複数個の電極間の沿面長さを長く
取るための前記主絶縁物の半径方向にＵ字溝を設
けたことを特徴とするイオン源。 In an ion source that includes a plasma chamber for generating plasma and a plurality of extraction electrodes for extracting ions from the plasma chamber, the plurality of extraction electrodes are included in a main insulator that forms part of a vacuum vessel and insulates and supports the plasma chamber. An ion source comprising: a mounting surface to which a plurality of electrodes can be directly attached; and a U-shaped groove provided in the radial direction of the main insulator for increasing the creepage length between the plurality of electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907686U JPS6375936U (en) | 1986-11-05 | 1986-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16907686U JPS6375936U (en) | 1986-11-05 | 1986-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375936U true JPS6375936U (en) | 1988-05-20 |
Family
ID=31102552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16907686U Pending JPS6375936U (en) | 1986-11-05 | 1986-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375936U (en) |
-
1986
- 1986-11-05 JP JP16907686U patent/JPS6375936U/ja active Pending
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