JPS6361748U - - Google Patents

Info

Publication number
JPS6361748U
JPS6361748U JP15578086U JP15578086U JPS6361748U JP S6361748 U JPS6361748 U JP S6361748U JP 15578086 U JP15578086 U JP 15578086U JP 15578086 U JP15578086 U JP 15578086U JP S6361748 U JPS6361748 U JP S6361748U
Authority
JP
Japan
Prior art keywords
ion beam
extraction electrodes
beam extraction
support member
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15578086U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15578086U priority Critical patent/JPS6361748U/ja
Publication of JPS6361748U publication Critical patent/JPS6361748U/ja
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例の縦断面図である。 １…支持部材、２…支持部材、３…電極、４…
電極、５…電極、６…支持部材、７…冷却配管、
８…リード線、９…永久磁石、１１…真空容器フ
ランジ、１２…イオン源取付フランジ、１３…絶
縁フランジ、１４…プラズマ室フランジ、１５…
プラズマ室内壁、１６…プラズマ室外壁、１７…
プラズマ室カバー、２１…フイラメント、２２…
プラズマ室。 The figure is a longitudinal sectional view of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Supporting member, 2...Supporting member, 3...Electrode, 4...
Electrode, 5... Electrode, 6... Support member, 7... Cooling pipe,
8... Lead wire, 9... Permanent magnet, 11... Vacuum vessel flange, 12... Ion source mounting flange, 13... Insulating flange, 14... Plasma chamber flange, 15...
Plasma indoor wall, 16...Plasma room outer wall, 17...
Plasma chamber cover, 21... filament, 22...
plasma chamber.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] イオンをイオンビームとして引き出す複数のイ
オンビーム引き出し電極を有するイオン源におい
て、イオンビーム引き出し電極の支持部材に電気
絶縁性が高く、かつ熱伝導性の高い材料を用いる
ことを特徴とするイオン源。 An ion source having a plurality of ion beam extraction electrodes for extracting ions as an ion beam, characterized in that a material with high electrical insulation and high thermal conductivity is used for a support member of the ion beam extraction electrodes.
JP15578086U 1986-10-13 1986-10-13 Pending JPS6361748U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15578086U JPS6361748U (en) 1986-10-13 1986-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15578086U JPS6361748U (en) 1986-10-13 1986-10-13

Publications (1)

Publication Number Publication Date
JPS6361748U true JPS6361748U (en) 1988-04-23

Family

ID=31076791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15578086U Pending JPS6361748U (en) 1986-10-13 1986-10-13

Country Status (1)

Country Link
JP (1) JPS6361748U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222241A (en) * 1990-01-25 1991-10-01 Tokyo Electron Ltd Ion source device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03222241A (en) * 1990-01-25 1991-10-01 Tokyo Electron Ltd Ion source device

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