JPS644050U - - Google Patents
Info
- Publication number
- JPS644050U JPS644050U JP9839687U JP9839687U JPS644050U JP S644050 U JPS644050 U JP S644050U JP 9839687 U JP9839687 U JP 9839687U JP 9839687 U JP9839687 U JP 9839687U JP S644050 U JPS644050 U JP S644050U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- heating
- stand
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Description
第1図、第3図は本考案の試料加熱用サンプル
ホルダーの断面図、第2図は試料加熱用サンプル
ホルダーを用いた実施例を示す図である。
1…試料、2…マイカ、3…サンプルカバー、
4…サンプル台、5…試料加熱用サンプルホルダ
ー、6…一次イオンビーム、7…引出し電極、8
…二次イオンビーム、9…エレクトロンスプレイ
、10…電子ビーム。
1 and 3 are cross-sectional views of a sample holder for heating a sample according to the present invention, and FIG. 2 is a diagram showing an embodiment using the sample holder for heating a sample. 1...sample, 2...mica, 3...sample cover,
4...Sample stand, 5...Sample holder for sample heating, 6...Primary ion beam, 7...Extraction electrode, 8
...Secondary ion beam, 9...Electron spray, 10...Electron beam.
Claims (1)
プルカバーより構成されるイオンマイクロアナラ
イザーのサンプルホルダーにおいて、サンプル台
と試料の間に断熱材を設けたことを特徴とする試
料加熱用サンプルホルダー。 2 請求の範囲第1項において、試料とサンプル
カバーの間に断熱材を設けたことを特徴とする試
料加熱用サンプルホルダー。 3 請求の範囲第1項において、試料とサンプル
台とに導電性をもたせるために試料とサンプル台
とが接触していることを特徴とする試料加熱用サ
ンプルホルダー。[Claims for Utility Model Registration] 1. A sample holder for an ion microanalyzer consisting of a sample stand on which a sample is placed and a sample cover for fixing the sample, characterized in that a heat insulating material is provided between the sample stand and the sample. Sample holder for sample heating. 2. The sample holder for heating a sample according to claim 1, characterized in that a heat insulating material is provided between the sample and the sample cover. 3. The sample holder for heating a sample according to claim 1, characterized in that the sample and the sample stage are in contact with each other in order to provide conductivity between the sample and the sample stage.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9839687U JPS644050U (en) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9839687U JPS644050U (en) | 1987-06-29 | 1987-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS644050U true JPS644050U (en) | 1989-01-11 |
Family
ID=31324620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9839687U Pending JPS644050U (en) | 1987-06-29 | 1987-06-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS644050U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017172593A (en) * | 2016-03-18 | 2017-09-28 | トヨタ自動車株式会社 | Power transmission device |
-
1987
- 1987-06-29 JP JP9839687U patent/JPS644050U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017172593A (en) * | 2016-03-18 | 2017-09-28 | トヨタ自動車株式会社 | Power transmission device |
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