JPS63188856U - - Google Patents
Info
- Publication number
- JPS63188856U JPS63188856U JP8134487U JP8134487U JPS63188856U JP S63188856 U JPS63188856 U JP S63188856U JP 8134487 U JP8134487 U JP 8134487U JP 8134487 U JP8134487 U JP 8134487U JP S63188856 U JPS63188856 U JP S63188856U
- Authority
- JP
- Japan
- Prior art keywords
- needle
- reservoir
- view
- sectional
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、従来のイオン源構造を示す断面図、
第２図は、従来のイオン源構造を示す断面図、第
３図は、第２図のニードル固定断面図、第４図は
、本考案にかかるニードル固定断面図、第５図は
、本考案にかかるキヤツプの平面図、第６図は、
本考案にかかるニードル固定断面図である。
１……ニードル、２……リザーバ、３……リフ
レクター、４……ヒータ、５……支持棒、６……
電極、７……絶縁板、８……液体金属、９……ね
じ、１０……キヤツプ、１１……割り溝、１２…
…ガス抜穴、１３……割込部、１４……突起部。
FIG. 1 is a cross-sectional view showing a conventional ion source structure;
FIG. 2 is a sectional view showing a conventional ion source structure, FIG. 3 is a sectional view of the needle fixed in FIG. 2, FIG. 4 is a sectional view of the needle fixed according to the present invention, and FIG. 5 is a sectional view of the present invention. The plan view of the cap shown in Fig. 6 is as follows.
FIG. 3 is a sectional view of a fixed needle according to the present invention. 1... Needle, 2... Reservoir, 3... Reflector, 4... Heater, 5... Support rod, 6...
Electrode, 7... Insulating plate, 8... Liquid metal, 9... Screw, 10... Cap, 11... Division groove, 12...
...Gas vent hole, 13...Interruption part, 14...Protrusion part.
Claims (1)
ヒータ、リザーバそしてニードルで構成された液
体金属イオン源において、リザーバに挿入された
チヤツクによつて、ニードルを固定することを特
徴とする液体金属イオン源。 Electrodes, insulating plates, used in ion beam devices,
A liquid metal ion source comprising a heater, a reservoir, and a needle, the needle being fixed by a chuck inserted into the reservoir.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8134487U JPS63188856U (en) | 1987-05-28 | 1987-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8134487U JPS63188856U (en) | 1987-05-28 | 1987-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63188856U true JPS63188856U (en) | 1988-12-05 |
Family
ID=30932995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8134487U Pending JPS63188856U (en) | 1987-05-28 | 1987-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63188856U (en) |
-
1987
- 1987-05-28 JP JP8134487U patent/JPS63188856U/ja active Pending