JPH0461846U - - Google Patents
Info
- Publication number
- JPH0461846U JPH0461846U JP10532990U JP10532990U JPH0461846U JP H0461846 U JPH0461846 U JP H0461846U JP 10532990 U JP10532990 U JP 10532990U JP 10532990 U JP10532990 U JP 10532990U JP H0461846 U JPH0461846 U JP H0461846U
- Authority
- JP
- Japan
- Prior art keywords
- liquid metal
- replaced
- ion source
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案のイオン源の断面図、第２図は
本考案の他の実施例のイオン源の断面図、第３図
は従来のイオン源の断面図を示す。
１……エミツタ、２……液体金属だめ、３……
ヒーター、４……ソケツト、５……液体金属、６
……ベース、７……ヒーター用電極、８……エミ
ツタ固定ネジ。
FIG. 1 is a cross-sectional view of an ion source according to the present invention, FIG. 2 is a cross-sectional view of an ion source according to another embodiment of the present invention, and FIG. 3 is a cross-sectional view of a conventional ion source. 1...Emitsuta, 2...Liquid metal pot, 3...
Heater, 4...Socket, 5...Liquid metal, 6
... Base, 7 ... Electrode for heater, 8 ... Emitter fixing screw.
Claims (1)
オン源において、そのイオン発生点となるエミツ
タを交換することのできることを特徴とする液体
金属イオン源。 A liquid metal ion source used in a focused ion beam device, characterized in that an emitter serving as an ion generation point can be replaced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10532990U JPH0461846U (en) | 1990-10-05 | 1990-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10532990U JPH0461846U (en) | 1990-10-05 | 1990-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0461846U true JPH0461846U (en) | 1992-05-27 |
Family
ID=31850984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10532990U Pending JPH0461846U (en) | 1990-10-05 | 1990-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0461846U (en) |
-
1990
- 1990-10-05 JP JP10532990U patent/JPH0461846U/ja active Pending