JPS62193659U - - Google Patents
Info
- Publication number
- JPS62193659U JPS62193659U JP8096986U JP8096986U JPS62193659U JP S62193659 U JPS62193659 U JP S62193659U JP 8096986 U JP8096986 U JP 8096986U JP 8096986 U JP8096986 U JP 8096986U JP S62193659 U JPS62193659 U JP S62193659U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- output side
- ion
- beam output
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 150000002500 ions Chemical class 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、本考案の一実施例の縦断面図、第２
図は、本考案の他の実施例の縦断面図である。
１……カソード、２……アノード、３……永久
磁石、４……プラズマ電極、４ａ……フランジ、
４ｂ……電極、５……電子抑制電極、６，６ａ…
…カバー、７……電子源、８……出力フランジ、
９……絶縁スペーサ、１３……ガス導入口。
Fig. 1 is a vertical sectional view of one embodiment of the present invention;
The figure is a longitudinal sectional view of another embodiment of the present invention. 1... Cathode, 2... Anode, 3... Permanent magnet, 4... Plasma electrode, 4a... Flange,
4b...electrode, 5...electron suppression electrode, 6,6a...
...Cover, 7...Electron source, 8...Output flange,
9...Insulating spacer, 13...Gas inlet.
Claims (1)
パチヤーを有するイオン源と、イオンビーム出力
側に電子源のある装置において、プラズマ電極を
イオンビーム出力側よりおおい、負電位および接
地電位のいずれか一方の電位が与えられたカバー
を設けたことを特徴とする大口径イオン源。 In a device that has an ion source with multiple apertures that extract ions as an ion beam and an electron source on the ion beam output side, the plasma electrode is covered from the ion beam output side and one of a negative potential and a ground potential is applied. A large-diameter ion source characterized by having a closed cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096986U JPS62193659U (en) | 1986-05-30 | 1986-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096986U JPS62193659U (en) | 1986-05-30 | 1986-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62193659U true JPS62193659U (en) | 1987-12-09 |
Family
ID=30932270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8096986U Pending JPS62193659U (en) | 1986-05-30 | 1986-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62193659U (en) |
-
1986
- 1986-05-30 JP JP8096986U patent/JPS62193659U/ja active Pending
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