JPS60139241U

JPS60139241U - Ionization vacuum gauge for charged particle analyzer

Info

Publication number: JPS60139241U
Application number: JP2706584U
Authority: JP
Inventors: 浩竹内; 好夫北
Original assignee: 日本原子力研究所; 株式会社東芝
Priority date: 1984-02-27
Filing date: 1984-02-27
Publication date: 1985-09-14
Also published as: JPH0338669Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図及び第２図は従来の荷電粒子分析器の電離真空計
を示す概略構成図、第３図は本考案の実施例に係る荷電
粒子分析器の電離真空計を示す概　。略構成図、第４図、第５図及び第６図は本考案め−他の
実施例に係る荷電粒子分析器の電離真空計を示す概略構
成図、第７図は第６図中の補助電極の讐〒″″’ｉｗ；
＊ｉｉ、２−’Ｉ＃Ｘ’！ｇ＋、１０−００、容器、１
０ａ・・・開口部、１０ｂ・・・折曲部、１１・・・フ
ィラメント、１２・・・グリッド、１３・・・コレツ　
　　　　□夕、２０．２０’・・・第１の補助電極、２
１．２４・・・直流電源、２２・・・筒状部材、２２ａ
・・・開口部、　　　　−２３，２３’・・・第２の補
助電極。１’、　　１七ｔｊ１．ＩＩＩ■、Ｆｊｉ1 and 2 are schematic configuration diagrams showing an ionization vacuum gauge of a conventional charged particle analyzer, and FIG. 3 is a schematic diagram showing an ionization vacuum gauge of a charged particle analyzer according to an embodiment of the present invention. 4, 5 and 6 are schematic configuration diagrams showing an ionization vacuum gauge of a charged particle analyzer according to another embodiment of the present invention, and FIG. 7 is an auxiliary diagram of FIG. 6. Enemy of the electrode〒″″'iw;
*ii, 2-'I#X'! g+, 10-00, container, 1
0a...Opening part, 10b...Bending part, 11...Filament, 12...Grid, 13...Korets
□Evening, 20.20'...First auxiliary electrode, 2
1.24... DC power supply, 22... Cylindrical member, 22a
...Aperture, -23,23'...Second auxiliary electrode. 1', 17tj 1. III■, Fji

Claims

[Claim for Utility Model Registration] 1. A cathode and an anode are housed in a container that communicates with a charged particle analyzer that is a vacuum system, and the cathode and anode ionize gas molecules in the vacuum system to generate ionized particles. An auxiliary electrode having a predetermined potential with respect to the cathode is disposed at an opening communicating with the vacuum system of the ionization vacuum of the charged particle analyzer, which measures the ring and determines the degree of vacuum within the charged particle analyzer. Design 5. An ionization vacuum meter for a charged particle analyzer characterized by the following features: 2 Utility Model Registration Scope of Claim 1. The ionization vacuum gauge includes a filament that emits thermionic electrons, a grid that extracts thermionic electrons, and a collector that collects ions, which are housed in the container. An ionization vacuum gauge for a charged particle analyzer comprising: 3. In the ionization vacuum gauge according to claim 2 of the registered utility model claim, the auxiliary electrode is configured to
Charged particle analyzer or ionization vacuum gauge with positive potential.
゛4°Registration of Utility Model In the ionization vacuum gauge according to claim 2, the auxiliary electrode includes a first electrode having a positive potential with respect to the filament and a second electrode having a negative potential with respect to the filament. An ionization vacuum gauge for a charged particle analyzer, comprising two electrodes.