JPS5879853U - Secondary ion mass spectrometer - Google Patents
Secondary ion mass spectrometerInfo
- Publication number
- JPS5879853U JPS5879853U JP17206281U JP17206281U JPS5879853U JP S5879853 U JPS5879853 U JP S5879853U JP 17206281 U JP17206281 U JP 17206281U JP 17206281 U JP17206281 U JP 17206281U JP S5879853 U JPS5879853 U JP S5879853U
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- ion mass
- secondary ion
- solid surface
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の電子衝撃型イオン源を持った二次イオン
質量分析計の構成図、第２図は本考案による一次イオン
源を持った二次イオン質量分析計の構成図である。
１・・・・・・電子衝撃イオン源ハウジング、２・・曲
レンズ電極、３・・・・・・アース電極、４・・・・・
・電子銃、５・・・・・・リベラー電極、６・・・・・
・−次イオンビーム、７・・・・・・サンプルホルダー
、８・・曲二次“イオン用対向電極、９・・・・・・レ
ンズ電極、１０・・・・・・アース電極、１１・・・・
・・インターロック、１２・・・・・・耐圧トランス、
１３・・・・・・電子電流制御電源、１４・・・・・・
高圧電源、１５・・・・・・イオン化室兼対向電極、１
６・・・・・・カミソリ電極およびホルダー。FIG. 1 is a block diagram of a secondary ion mass spectrometer having a conventional electron impact ion source, and FIG. 2 is a block diagram of a secondary ion mass spectrometer having a primary ion source according to the present invention. 1... Electron impact ion source housing, 2... Curved lens electrode, 3... Earth electrode, 4...
・Electron gun, 5... Liberator electrode, 6...
-Next ion beam, 7...Sample holder, 8...Counter electrode for curved secondary ions, 9...Lens electrode, 10...Ground electrode, 11... ...
...Interlock, 12...Voltage transformer,
13...Electronic current control power supply, 14...
High voltage power supply, 15...Ionization chamber and counter electrode, 1
6...Razor electrode and holder.
Claims (1)
記固体表面に付着させである有機化合物をイオン化して
観測する二次イオン質量分析計において、上記照射する
一次イオンを電界イオン化により生成するように構成し
てなることを特徴とする二次イオン質量分析計。A secondary ion mass spectrometer that ionizes and observes an organic compound attached to the solid surface in advance by irradiating the solid surface with ions is configured to generate the primary ions to be irradiated by electric field ionization. A secondary ion mass spectrometer characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17206281U JPS5879853U (en) | 1981-11-20 | 1981-11-20 | Secondary ion mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17206281U JPS5879853U (en) | 1981-11-20 | 1981-11-20 | Secondary ion mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5879853U true JPS5879853U (en) | 1983-05-30 |
Family
ID=29963969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17206281U Pending JPS5879853U (en) | 1981-11-20 | 1981-11-20 | Secondary ion mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5879853U (en) |
-
1981
- 1981-11-20 JP JP17206281U patent/JPS5879853U/en active Pending
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