JPS61199860U - - Google Patents
Info
- Publication number
- JPS61199860U JPS61199860U JP8383285U JP8383285U JPS61199860U JP S61199860 U JPS61199860 U JP S61199860U JP 8383285 U JP8383285 U JP 8383285U JP 8383285 U JP8383285 U JP 8383285U JP S61199860 U JPS61199860 U JP S61199860U
- Authority
- JP
- Japan
- Prior art keywords
- target
- electron emission
- beam irradiation
- irradiation device
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 3
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 230000001133 acceleration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、本考案の一実施例の概略説明図、第
２図は、第１図の電位を説明する線図である。
１……ガス導入系、２……イオン源、３……プ
ラズマ領域、４……加速電源、５……減速電源、
６……バイアス電源、７……電子放出源電源、９
……ターゲツト、１０……加速電極、１１……減
速電極。
FIG. 1 is a schematic explanatory diagram of an embodiment of the present invention, and FIG. 2 is a diagram illustrating the potential in FIG. 1. 1...Gas introduction system, 2...Ion source, 3...Plasma region, 4...Acceleration power supply, 5...Deceleration power supply,
6...Bias power supply, 7...Electron emission source power supply, 9
...Target, 10...Acceleration electrode, 11...Deceleration electrode.
Claims (1)
イオンが、照射されるターゲツトと、核イオン源
とターゲツトの間に配置された電子放出源と、そ
れらを真空に保持するチヤンバーより成るイオン
ビーム照射装置において、ターゲツトに最も近い
電極を電子放出源に対して負の電圧にバイアスす
ることを特徴とするイオンビーム照射装置。 an ion source comprising at least three electrodes;
In an ion beam irradiation device that consists of a target to be irradiated with ions, an electron emission source placed between the nuclear ion source and the target, and a chamber that holds them in a vacuum, the electrode closest to the target is used as the electron emission source. An ion beam irradiation device characterized by biasing to a negative voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8383285U JPS61199860U (en) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8383285U JPS61199860U (en) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199860U true JPS61199860U (en) | 1986-12-13 |
Family
ID=30632813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8383285U Pending JPS61199860U (en) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199860U (en) |
-
1985
- 1985-06-05 JP JP8383285U patent/JPS61199860U/ja active Pending
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