JPH0377467U - - Google Patents
Info
- Publication number
- JPH0377467U JPH0377467U JP13794389U JP13794389U JPH0377467U JP H0377467 U JPH0377467 U JP H0377467U JP 13794389 U JP13794389 U JP 13794389U JP 13794389 U JP13794389 U JP 13794389U JP H0377467 U JPH0377467 U JP H0377467U
- Authority
- JP
- Japan
- Prior art keywords
- gas circulation
- voltage
- circulation path
- collection electrode
- laser device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010419 fine particle Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Lasers (AREA)
Description
第１図はこの考案を実施した三軸直交形炭酸ガ
ス循環形レーザ装置の説明図、第２図は第１図の
放電部付近の拡大説明図である。
図面の主要な部分を表わす符号の説明、１……
三軸直交形炭酸ガス循環形レーザ装置、３……放
電部、５……陽極板、９……棒状陰極、１７……
捕集電極、２５……風洞壁（ガス循環路）。
FIG. 1 is an explanatory diagram of a three-axis orthogonal carbon dioxide gas circulation type laser device implementing this invention, and FIG. 2 is an enlarged explanatory diagram of the vicinity of the discharge section in FIG. 1. Explanation of the symbols representing the main parts of the drawing, 1...
Triaxial orthogonal carbon dioxide gas circulation laser device, 3...discharge section, 5...anode plate, 9...rod-shaped cathode, 17...
Collection electrode, 25...wind tunnel wall (gas circulation path).
Claims (1)
ングによつて発生する微粒子を捕集する捕集電極
を設け、ガス循環路と捕集電極間に高圧直流電圧
を、捕集電極が負側になるように印加すると共に
、ガス循環路側を接地してなる微粒子の捕集装置
を備えたことを特徴とするガス循環形レーザ装置
。 A collection electrode is provided on the downstream side of the gas flow of the discharge section to collect fine particles generated by cathode sputtering, and a high-voltage DC voltage is applied between the gas circulation path and the collection electrode, with the collection electrode on the negative side. What is claimed is: 1. A gas circulation type laser device, characterized in that the gas circulation type laser device is equipped with a particulate collection device configured to apply a voltage such that the gas circulation path side is grounded, and the gas circulation path side is grounded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794389U JPH0377467U (en) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794389U JPH0377467U (en) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377467U true JPH0377467U (en) | 1991-08-05 |
Family
ID=31685076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13794389U Pending JPH0377467U (en) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377467U (en) |
-
1989
- 1989-11-30 JP JP13794389U patent/JPH0377467U/ja active Pending
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