JPS60187450U - Secondary electron detection device for scanning electron microscope - Google Patents

Secondary electron detection device for scanning electron microscope

Info

Publication number
JPS60187450U
JPS60187450U JP7506284U JP7506284U JPS60187450U JP S60187450 U JPS60187450 U JP S60187450U JP 7506284 U JP7506284 U JP 7506284U JP 7506284 U JP7506284 U JP 7506284U JP S60187450 U JPS60187450 U JP S60187450U
Authority
JP
Japan
Prior art keywords
electron
detection device
secondary electron
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7506284U
Other languages
Japanese (ja)
Inventor
岡本　公治
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP7506284U priority Critical patent/JPS60187450U/en
Publication of JPS60187450U publication Critical patent/JPS60187450U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来装置の略図、第２図は本考案の一実施例の
略図である。 １：電子銃、２：電子線、３：試料、４：２次電子、５
ニライトパイプ、６：光電子増倍管、７：２次電子収集
電極、８：電流電源、９：シールド筒、１０：加速電源
、１１：直流電源。FIG. 1 is a schematic diagram of a conventional device, and FIG. 2 is a schematic diagram of an embodiment of the present invention. 1: Electron gun, 2: Electron beam, 3: Sample, 4: Secondary electron, 5
Nilight pipe, 6: photomultiplier tube, 7: secondary electron collection electrode, 8: current power supply, 9: shield tube, 10: acceleration power supply, 11: DC power supply.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 電子銃からの電子ビームを加速電圧■で加速して試料に
照射する手段と、該電子線の照射に基づく該試料よりの
２次電子を収集する２次電子収集電極と、該２次電子収
集電極によって収集された２次電子を検出するための２
次電子検出器を備えた装置において、該加速電圧■の切
り換えに連動させて２次電子収集電極の印加電圧を変化
させる手段を具備したことを特徴とする走査電子顕微鏡
用２次電子検出装置。means for accelerating an electron beam from an electron gun with an accelerating voltage ■ and irradiating the sample; a secondary electron collection electrode for collecting secondary electrons from the sample based on the irradiation with the electron beam; 2 for detecting the secondary electrons collected by the electrodes.
A secondary electron detection device for a scanning electron microscope, characterized in that the device is equipped with a means for changing the voltage applied to the secondary electron collecting electrode in conjunction with switching of the acceleration voltage (1).
JP7506284U 1984-05-22 1984-05-22 Secondary electron detection device for scanning electron microscope Pending JPS60187450U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7506284U JPS60187450U (en) 1984-05-22 1984-05-22 Secondary electron detection device for scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7506284U JPS60187450U (en) 1984-05-22 1984-05-22 Secondary electron detection device for scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS60187450U true JPS60187450U (en) 1985-12-12

Family

ID=30615931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7506284U Pending JPS60187450U (en) 1984-05-22 1984-05-22 Secondary electron detection device for scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS60187450U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140351A (en) * 1985-12-16 1987-06-23 Hitachi Ltd Scanning electron microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411275A (en) * 1977-03-22 1979-01-27 Alfa Laval Ab Recovery of meat material and fat from animal material
JPS56101581A (en) * 1980-01-18 1981-08-14 Jeol Ltd Detection device provided with secondary electron multiplier

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411275A (en) * 1977-03-22 1979-01-27 Alfa Laval Ab Recovery of meat material and fat from animal material
JPS56101581A (en) * 1980-01-18 1981-08-14 Jeol Ltd Detection device provided with secondary electron multiplier

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140351A (en) * 1985-12-16 1987-06-23 Hitachi Ltd Scanning electron microscope

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