JPS61116063U - - Google Patents
Info
- Publication number
- JPS61116063U JPS61116063U JP20209984U JP20209984U JPS61116063U JP S61116063 U JPS61116063 U JP S61116063U JP 20209984 U JP20209984 U JP 20209984U JP 20209984 U JP20209984 U JP 20209984U JP S61116063 U JPS61116063 U JP S61116063U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- objective lens
- electrode
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Description
第１図は本考案の一実施例装置の構成図、第２
図、第３図、及び第４図は考案装置の動作状態を
説明するための図、第５図、第６は従来装置を説
明するための図である。
１：電子線、２：磁極片、３：試料、４：シン
チレーター、５：ライトガイド、６：光電子増倍
管、７：コレクタ電極、８：引き出し電極、９：
鏡筒、１０：試料ホルダー、１１：試料ステージ
、１２：メツシユ状電極、１３：金属回転棒、１
４：支持金具、１５：絶縁部材、１６：ハンドル
、Ｄ：２次電子検出器。
Fig. 1 is a configuration diagram of an embodiment of the device of the present invention;
1, 3 and 4 are diagrams for explaining the operating state of the invented device, and FIGS. 5 and 6 are diagrams for explaining the conventional device. 1: Electron beam, 2: Magnetic pole piece, 3: Sample, 4: Scintillator, 5: Light guide, 6: Photomultiplier tube, 7: Collector electrode, 8: Extraction electrode, 9:
Lens barrel, 10: sample holder, 11: sample stage, 12: mesh electrode, 13: metal rotating rod, 1
4: Support metal fittings, 15: Insulating member, 16: Handle, D: Secondary electron detector.
補正 昭６０．４．２７
図面の簡単な説明を次のように補正する。
明細書第８頁第２行目を次の通り補正する。
「説明するための図、第５図は従来装置の構成
図、第６図は従来装置の動作状態を説」Amendment April 27, 1980 The brief description of the drawing is amended as follows. The second line of page 8 of the specification is amended as follows. "Diagrams for explanation. Figure 5 is a configuration diagram of the conventional device, and Figure 6 explains the operating state of the conventional device."
Claims (1)
料に電子線を照射し、上記試料よりの２次電子を
前記対物レンズの光軸に対して傾斜した側面に沿
つて配置された２次電子検出器によつて検出する
ようにした装置において、正の電圧が印加された
メツシユ状電極と、該メツシユ状電極を該２次電
子検出器の高電圧が印加される電極と試料との間
に選択的に配置する手段を設けたことを特徴とす
る電子線装置。 (2) 前記メツシユ状電極の電位を可変としたこ
とを特徴とする実用新案登録請求の範囲第１項記
載の電子線装置。[Claims for Utility Model Registration] (1) An electron beam is irradiated onto a sample movably placed under an objective lens, and secondary electrons from the sample are emitted from a side surface inclined with respect to the optical axis of the objective lens. In a device for detecting by a secondary electron detector arranged along the 1. An electron beam apparatus comprising means for selectively arranging between an electrode and a sample. (2) The electron beam device according to claim 1, wherein the potential of the mesh electrode is variable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984202099U JPH0236209Y2 (en) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984202099U JPH0236209Y2 (en) | 1984-12-28 | 1984-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116063U true JPS61116063U (en) | 1986-07-22 |
| JPH0236209Y2 JPH0236209Y2 (en) | 1990-10-02 |
Family
ID=30764503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984202099U Expired JPH0236209Y2 (en) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0236209Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49123573A (en) * | 1973-03-30 | 1974-11-26 |
-
1984
- 1984-12-28 JP JP1984202099U patent/JPH0236209Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49123573A (en) * | 1973-03-30 | 1974-11-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0236209Y2 (en) | 1990-10-02 |
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