JPS61119251U - - Google Patents
Info
- Publication number
- JPS61119251U JPS61119251U JP189885U JP189885U JPS61119251U JP S61119251 U JPS61119251 U JP S61119251U JP 189885 U JP189885 U JP 189885U JP 189885 U JP189885 U JP 189885U JP S61119251 U JPS61119251 U JP S61119251U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- sample
- electron beam
- changing
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は本考案の一実施例装置の構成図、第２
図は上記一実施例装置の動作状態を説明するため
の図、第３図、第４図は従来装置を説明するため
の図である。
１：電子線、２：電子銃、３：磁極片、４：試
料、５：試料ホルダ、６：試料ステージ、７：駆
動装置、１４：コレクタ電極、１５：鏡筒、１７
：補助電極、１８：絶縁部材、１９：シンチレー
タ、２０：ライトガイド、２１：電極、２２：直
流電源、２３：加速電源、２４：制御回路、２５
：操作盤。
Fig. 1 is a configuration diagram of an embodiment of the device of the present invention;
The figure is a diagram for explaining the operating state of the device of the above embodiment, and FIGS. 3 and 4 are diagrams for explaining the conventional device. 1: Electron beam, 2: Electron gun, 3: Magnetic pole piece, 4: Sample, 5: Sample holder, 6: Sample stage, 7: Drive device, 14: Collector electrode, 15: Lens barrel, 17
: Auxiliary electrode, 18: Insulating member, 19: Scintillator, 20: Light guide, 21: Electrode, 22: DC power supply, 23: Acceleration power supply, 24: Control circuit, 25
:Operation board.
Claims (1)
料に加速電圧を変化させて電子線を照射し、上記
試料よりの２次電子を高電圧が印加される電極を
有する２次電子検出器で捕獲検出する装置におい
て、前記電極の前方に配置された少なくとも１個
の補助電極と、前記電極及び補助電極の電位を前
記試料の光軸方向の移動又は加速電圧の変化に連
動させて変化させる手段とを設けたことを特徴と
する電子線装置。 (2) 前記２次電子検出器を前記対物レンズの光
軸に対して傾斜した側面に沿つて配置したことを
特徴とする実用新案登録請求の範囲第１項記載の
電子線装置。[Claims for Utility Model Registration] (1) A sample movably placed under an objective lens is irradiated with an electron beam while changing the acceleration voltage, and a high voltage is applied to secondary electrons from the sample. In a device that captures and detects secondary electrons with a secondary electron detector having an electrode, at least one auxiliary electrode is arranged in front of the electrode, and the potential of the electrode and the auxiliary electrode is changed to a voltage for moving or accelerating the sample in the optical axis direction. An electron beam device characterized in that it is provided with a means for changing in conjunction with a change in. (2) The electron beam device according to claim 1, wherein the secondary electron detector is arranged along a side surface of the objective lens that is inclined with respect to the optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP189885U JPS61119251U (en) | 1985-01-11 | 1985-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP189885U JPS61119251U (en) | 1985-01-11 | 1985-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61119251U true JPS61119251U (en) | 1986-07-28 |
Family
ID=30475062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP189885U Pending JPS61119251U (en) | 1985-01-11 | 1985-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119251U (en) |
-
1985
- 1985-01-11 JP JP189885U patent/JPS61119251U/ja active Pending
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