JPS6283947U - - Google Patents
Info
- Publication number
- JPS6283947U JPS6283947U JP17453685U JP17453685U JPS6283947U JP S6283947 U JPS6283947 U JP S6283947U JP 17453685 U JP17453685 U JP 17453685U JP 17453685 U JP17453685 U JP 17453685U JP S6283947 U JPS6283947 U JP S6283947U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- guide mechanism
- pipe shaft
- magnetically coupled
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005096 rolling process Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Description
第１図は本考案の実施例であるころがり案内機
構を取付けた磁気結合式試料交換棒の断面図、第
２図は第１図のＡ―Ａ断面図、第３図はころがり
案内機構の組立状況を説明する斜視図、第４図は
従来の磁気結合式試料交換棒の断面図、第５図は
集束イオンビーム装置の概略構成図、第６図はイ
オンビームの軌跡を示す図である。
１…永久磁石、２…ポールピース、３，２４…
パイプ、４…パイプ軸、５…リニヤモーシヨンベ
アリング、６…回転軸、７…回転軸ベアリング、
８…Ｏリング、９…ねじ、１０…試料運搬台、１
１…試料、１２…試料台、２０…ころがり案内機
構、２２…移動体、２３…回転ベアリング、２５
…ベアリング軸、３２…エミツタ、３３…引出し
電極、３４…電源、３５…加速管、３６，４２…
分圧器、３７…コンデンサレンズ、３９…対物レ
ンズ、４０…偏向器、４１…試料。
Figure 1 is a cross-sectional view of a magnetically coupled sample exchange rod equipped with a rolling guide mechanism according to an embodiment of the present invention, Figure 2 is a cross-sectional view taken along line AA in Figure 1, and Figure 3 is an assembly of the rolling guide mechanism. FIG. 4 is a sectional view of a conventional magnetically coupled sample exchange rod, FIG. 5 is a schematic diagram of a focused ion beam device, and FIG. 6 is a diagram showing the trajectory of an ion beam. 1...Permanent magnet, 2...Pole piece, 3, 24...
Pipe, 4... Pipe shaft, 5... Linear motion bearing, 6... Rotating shaft, 7... Rotating shaft bearing,
8...O-ring, 9...screw, 10...sample carrier, 1
DESCRIPTION OF SYMBOLS 1... Sample, 12... Sample stage, 20... Rolling guide mechanism, 22... Moving body, 23... Rotating bearing, 25
...bearing shaft, 32...emitter, 33...extraction electrode, 34...power supply, 35...acceleration tube, 36,42...
Voltage divider, 37... Condenser lens, 39... Objective lens, 40... Deflector, 41... Sample.
Claims (1)
外部から無接触で交換するための磁気結合式試料
交換棒において、永久磁石によつて非接触に移動
させられるポールピース近傍にパイプ軸に挿入し
たころがり案内機構を設け、該ころがり案内機構
は移動体の長手方向の横面に上下２ケの貫通穴を
有し、該貫通穴にはパイプ、パイプにはパイプ軸
をそれぞれ挿通し、該パイプ軸両端には回転ベア
リングを取付けたことを特徴とする磁気結合式試
料交換棒。 In a magnetically coupled sample exchange rod for exchanging samples in high vacuum equipment such as focused ion beam equipment without contact from the outside, a roller inserted into the pipe shaft near the pole piece that is moved without contact by a permanent magnet. A guide mechanism is provided, and the rolling guide mechanism has two upper and lower through holes on the longitudinal side surface of the moving body, a pipe is inserted into the through holes, a pipe shaft is inserted into the pipe, and both ends of the pipe shaft are inserted. A magnetically coupled sample exchange rod that is equipped with a rotating bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17453685U JPH043247Y2 (en) | 1985-11-12 | 1985-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17453685U JPH043247Y2 (en) | 1985-11-12 | 1985-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283947U true JPS6283947U (en) | 1987-05-28 |
| JPH043247Y2 JPH043247Y2 (en) | 1992-02-03 |
Family
ID=31113010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17453685U Expired JPH043247Y2 (en) | 1985-11-12 | 1985-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH043247Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1130573A (en) * | 1997-05-20 | 1999-02-02 | Jeol Ltd | Holder holding device |
| JP2009115652A (en) * | 2007-11-07 | 2009-05-28 | Institute Of Physical & Chemical Research | Sample pin holding attachment |
-
1985
- 1985-11-12 JP JP17453685U patent/JPH043247Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1130573A (en) * | 1997-05-20 | 1999-02-02 | Jeol Ltd | Holder holding device |
| JP2009115652A (en) * | 2007-11-07 | 2009-05-28 | Institute Of Physical & Chemical Research | Sample pin holding attachment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043247Y2 (en) | 1992-02-03 |
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