JPS58146349U - Electron energy analyzer - Google Patents
Electron energy analyzerInfo
- Publication number
- JPS58146349U JPS58146349U JP4298882U JP4298882U JPS58146349U JP S58146349 U JPS58146349 U JP S58146349U JP 4298882 U JP4298882 U JP 4298882U JP 4298882 U JP4298882 U JP 4298882U JP S58146349 U JPS58146349 U JP S58146349U
- Authority
- JP
- Japan
- Prior art keywords
- electron energy
- detector
- opening
- electric field
- tube electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来装置を説明するための図、第２図はリング
状のスリットを説明するための図、第３図は従来装置に
よって得られたスペクトルビークを例示するための図、
第４図は本考案の一実施例の要部を示すための図、第５
図は本考案に基づく装置によって得られたスペクトルビ
ークを例示するための図である。
１：試料、２：電子線、３：内筒電極、４ａ、 ４ｂ
Ｈ開口、５：外筒電極、６：可変電源、７：オージェ電
子、８：検出器、９：棒、１０，１２：ピンホール、１
１．１３ニアパーチヤ板。
０２FIG. 1 is a diagram for explaining a conventional device, FIG. 2 is a diagram for explaining a ring-shaped slit, and FIG. 3 is a diagram for illustrating a spectrum peak obtained by the conventional device.
Figure 4 is a diagram showing the main part of an embodiment of the present invention, Figure 5
The figure is a diagram for illustrating spectral peaks obtained by the apparatus based on the present invention. 1: Sample, 2: Electron beam, 3: Inner cylinder electrode, 4a, 4b
H opening, 5: Outer cylinder electrode, 6: Variable power supply, 7: Auger electron, 8: Detector, 9: Rod, 10, 12: Pinhole, 1
1.13 Near Percha Plate. 02
Claims (1)
設けられた外筒電極と、両電極間に電界を生せしめるた
めの可変電源と、前記開口部の一方を通って前記電界中
に導かれた後前記開口部の他方を通って該電界外に導か
れた電子を検出するための検出器と、前記他方の開口部
と該検出器との間に設けられたスリットとを備えた装置
において、前記他方の開口部と検出器との間に第２のス
リットを具備したことを特徴とする電子のエネルギー分
析装置。An inner tube electrode having two openings, an outer tube electrode provided coaxially with the inner tube electrode, a variable power source for generating an electric field between both electrodes, and a a detector for detecting electrons guided into the electric field and then guided out of the electric field through the other opening; a slit provided between the other opening and the detector; An electron energy analysis device comprising: a second slit between the other opening and the detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4298882U JPS58146349U (en) | 1982-03-26 | 1982-03-26 | Electron energy analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4298882U JPS58146349U (en) | 1982-03-26 | 1982-03-26 | Electron energy analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58146349U true JPS58146349U (en) | 1983-10-01 |
Family
ID=30054084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4298882U Pending JPS58146349U (en) | 1982-03-26 | 1982-03-26 | Electron energy analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58146349U (en) |
-
1982
- 1982-03-26 JP JP4298882U patent/JPS58146349U/en active Pending
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