JPS5860850U - Charged particle beam device - Google Patents
Charged particle beam deviceInfo
- Publication number
- JPS5860850U JPS5860850U JP15553181U JP15553181U JPS5860850U JP S5860850 U JPS5860850 U JP S5860850U JP 15553181 U JP15553181 U JP 15553181U JP 15553181 U JP15553181 U JP 15553181U JP S5860850 U JPS5860850 U JP S5860850U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- beam device
- converting
- heating current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は電子顕微鏡の電子銃における高圧とフィラメン
トの駆動回路図を示す。
１・・・・・・高圧電源、２・・・・・・フィラメント
電源、３・・・・・・変換器、４・・・・・・増巾器、
５・・・・・・表示器、６・・・・・・光ファイバー、
７・・・・・・トランス、８・・・・・・光変換器、ｉ
・・・・・・整流器、１０・・・・・・増巾器、１１・
・・・・・検出器、１２−−−−−−ウェネルト、１３
・・・・・・フィラメント、１４・・・・・・電子銃、
１５・・・・・・高圧ケーブル。FIG. 1 shows a high voltage and filament drive circuit diagram in an electron gun of an electron microscope. 1... High voltage power supply, 2... Filament power supply, 3... Converter, 4... Amplifier,
5...Display device, 6...Optical fiber,
7...Transformer, 8...Optical converter, i
... Rectifier, 10... Amplifier, 11.
...Detector, 12-----Wehnelt, 13
...Filament, 14...Electron gun,
15...High voltage cable.
Claims (1)
を用いて低圧側に搬送し、再び電気信号に変換し、陰極
加熱電流値の監視を可能としたことを特徴とする荷電粒
子線装置。A charged particle beam characterized by detecting a cathode heating current, transporting it to the low voltage side using a means for converting the word detection signal into light, and converting it back into an electric signal, thereby making it possible to monitor the cathode heating current value. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15553181U JPS5860850U (en) | 1981-10-21 | 1981-10-21 | Charged particle beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15553181U JPS5860850U (en) | 1981-10-21 | 1981-10-21 | Charged particle beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5860850U true JPS5860850U (en) | 1983-04-23 |
Family
ID=29948109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15553181U Pending JPS5860850U (en) | 1981-10-21 | 1981-10-21 | Charged particle beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5860850U (en) |
-
1981
- 1981-10-21 JP JP15553181U patent/JPS5860850U/en active Pending
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