JPS5990167U - Electron beam generator - Google Patents

Electron beam generator

Info

Publication number
JPS5990167U
JPS5990167U JP18611482U JP18611482U JPS5990167U JP S5990167 U JPS5990167 U JP S5990167U JP 18611482 U JP18611482 U JP 18611482U JP 18611482 U JP18611482 U JP 18611482U JP S5990167 U JPS5990167 U JP S5990167U
Authority
JP
Japan
Prior art keywords
filament
power supply
electron beam
beam generator
applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18611482U
Other languages
Japanese (ja)
Inventor
正二 加藤
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP18611482U priority Critical patent/JPS5990167U/en
Publication of JPS5990167U publication Critical patent/JPS5990167U/en
Pending legal-status Critical Current

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  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は電子ビーム発生装置の従来装置の概略構成図、
第２図は本考案の一実施例装置の構成概略図である。− １・・・・・・フィラメント、２・・・・・・フィラメ
ント加熱電源、３・・・・・・絶縁トランス群、４・・
・・・・高圧電源、５・・・・・・真空容器、−６・・
・・・・電子ビーム、７・・・・・・圧力容器、８・・
′・・・・鏡筒、９・・・・・・発光素子、１０・・・
・・・観察窓。Figure 1 is a schematic configuration diagram of a conventional electron beam generator;
FIG. 2 is a schematic diagram of an apparatus according to an embodiment of the present invention. - 1... Filament, 2... Filament heating power supply, 3... Insulation transformer group, 4...
...High voltage power supply, 5...Vacuum container, -6...
...Electron beam, 7...Pressure vessel, 8...
′... Lens barrel, 9... Light emitting element, 10...
...Observation window.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] フィラメント電源と、該フィラメント電源からの電力を
真空容器内に設けられた陰極フィラメントに印加するた
めの絶縁トランス群と、前記陰極フィラメントと接地電
位間に負の直流電圧を印加するための直流高圧電源と、
該絶縁トランス群とフィラメントの間に設けられた光素
子と、該絶縁トランス群と高圧電源を収納する密閉容器
と、該容器の一部に設けられた発光素子を観察するため
の観察窓から構成された電子ビーム発生装置。A filament power supply, a group of insulation transformers for applying power from the filament power supply to a cathode filament provided in a vacuum container, and a DC high voltage power supply for applying a negative DC voltage between the cathode filament and ground potential. and,
Consisting of an optical element provided between the insulation transformer group and the filament, an airtight container housing the insulation transformer group and high-voltage power supply, and an observation window provided in a part of the container for observing the light emitting element. electron beam generator.
JP18611482U 1982-12-09 1982-12-09 Electron beam generator Pending JPS5990167U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18611482U JPS5990167U (en) 1982-12-09 1982-12-09 Electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18611482U JPS5990167U (en) 1982-12-09 1982-12-09 Electron beam generator

Publications (1)

Publication Number Publication Date
JPS5990167U true JPS5990167U (en) 1984-06-19

Family

ID=30402087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18611482U Pending JPS5990167U (en) 1982-12-09 1982-12-09 Electron beam generator

Country Status (1)

Country Link
JP (1) JPS5990167U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127671A (en) * 1975-04-30 1976-11-06 Hitachi Ltd Power supply for electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127671A (en) * 1975-04-30 1976-11-06 Hitachi Ltd Power supply for electron gun

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