JPS62126056U - - Google Patents
Info
- Publication number
- JPS62126056U JPS62126056U JP14366685U JP14366685U JPS62126056U JP S62126056 U JPS62126056 U JP S62126056U JP 14366685 U JP14366685 U JP 14366685U JP 14366685 U JP14366685 U JP 14366685U JP S62126056 U JPS62126056 U JP S62126056U
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- kotsukucroft
- voltage
- schematic diagram
- voltage generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Generation Of Surge Voltage And Current (AREA)
Description
第１図は本考案の一実施例として示したコツク
クロフト回路を使用した高電圧発生回路の概略図
、第２図はその動作の説明を補足する為に使用し
た周波数―インピーダンス特性を表したもの、第
３図は本考案の他の実施例として示した集束イオ
ンビーム装置の概略図、第４図は従来のコツクク
ロフト回路を使用した高電圧発生回路の概略図、
第５図は従来の集束イオンビーム装置の概略図で
ある。
Ｅ１，Ｅ２：励振用交流電源、ＬＯ：負荷、Ｒ
０：帰環抵抗、ＯＣ：出力制御回路ＯＣ、ＣＬ１
，ＣＬ２，ＣＬ３：共振回路、１：加速電圧発生
回路、２：エミツタ、３：引出し電極、４：引出
し電圧印加用電源、５：加速管、６：分圧器、７
：コンデンサレンズ、８：質量分離器、９：対物
レンズ、１０：偏向器、１１：ターゲツト、１２
：分圧器。
Fig. 1 is a schematic diagram of a high voltage generation circuit using a Kotscroft circuit shown as an embodiment of the present invention, and Fig. 2 shows a frequency-impedance characteristic used to supplement the explanation of its operation. FIG. 3 is a schematic diagram of a focused ion beam device shown as another embodiment of the present invention, and FIG. 4 is a schematic diagram of a high voltage generation circuit using a conventional Kotscroft circuit.
FIG. 5 is a schematic diagram of a conventional focused ion beam device. E 1 , E 2 : Excitation AC power supply, LO: Load, R
0 : Return resistance, OC: Output control circuit OC, CL 1
, CL 2 , CL 3 : resonant circuit, 1 : accelerating voltage generation circuit, 2 : emitter, 3 : extraction electrode, 4 : power source for applying extraction voltage, 5 : accelerating tube, 6 : voltage divider, 7
: Condenser lens, 8: Mass separator, 9: Objective lens, 10: Deflector, 11: Target, 12
: Voltage divider.
Claims (1)
生回路を具備した装置において、コツククロフト
ウオルトン回路の高圧整流電圧の取出し用インピ
ーダンスを、少なくともインダクタンスとコンデ
ンサを持つ共振回路で構成した事を特徴とする荷
電粒子ビーム装置。 A device equipped with a high voltage generation circuit having a Kotsukucroft-Walton circuit, characterized in that the impedance for taking out the high-voltage rectified voltage of the Kotsukucroft-Walton circuit is constituted by a resonant circuit having at least an inductance and a capacitor. Beam device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14366685U JPH0512916Y2 (en) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14366685U JPH0512916Y2 (en) | 1985-09-20 | 1985-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62126056U true JPS62126056U (en) | 1987-08-10 |
| JPH0512916Y2 JPH0512916Y2 (en) | 1993-04-05 |
Family
ID=31053560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14366685U Expired - Lifetime JPH0512916Y2 (en) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512916Y2 (en) |
-
1985
- 1985-09-20 JP JP14366685U patent/JPH0512916Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512916Y2 (en) | 1993-04-05 |
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