JPS6176675U - - Google Patents
Info
- Publication number
- JPS6176675U JPS6176675U JP16102384U JP16102384U JPS6176675U JP S6176675 U JPS6176675 U JP S6176675U JP 16102384 U JP16102384 U JP 16102384U JP 16102384 U JP16102384 U JP 16102384U JP S6176675 U JPS6176675 U JP S6176675U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- ion milling
- thin plate
- electron microscopy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000992 sputter etching Methods 0.000 claims description 4
- 238000001493 electron microscopy Methods 0.000 claims 1
- 238000004627 transmission electron microscopy Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は試料の保持方法を示す図、第２図は透
過電顕の説明図、第３図はイオンミリング装置の
真空チヤンバー構成図である。
１…Ｍｏ薄板、２…接着剤、３…電顕試料、４
…フイラメント、５…ウエネルト、６…アノード
、７…コンデンサレンズ、８…対物レンズ、９…
試料ホルダ、１０…投射レンズ、１１…蛍光板、
１２…イオンミリング装置真空チヤンバー、１３
…光学顕微鏡、１４…イオンガン、１５…高圧電
源、１６…真空排気ポンプ。
FIG. 1 is a diagram showing a method of holding a sample, FIG. 2 is an explanatory diagram of a transmission electron microscope, and FIG. 3 is a configuration diagram of a vacuum chamber of an ion milling apparatus. 1... Mo thin plate, 2... adhesive, 3... electron microscope sample, 4
... filament, 5... Wehnelt, 6... anode, 7... condenser lens, 8... objective lens, 9...
Sample holder, 10... Projection lens, 11... Fluorescent screen,
12...Ion milling device vacuum chamber, 13
...Optical microscope, 14...Ion gun, 15...High voltage power supply, 16...Vacuum pump.
Claims (1)
ダにセツトする構造のイオンミリング装置試料支
持に於いて、少なくとも薄板をホルダから外すこ
となく、電顕の試料ホルダとして使用出来ること
を特徴とするイオンミリング装置。 A sample support for an ion milling device having a structure in which a sample for transmission electron microscopy is set on a thin plate bonded to a holder, is characterized in that it can be used as a sample holder for electron microscopy without at least removing the thin plate from the holder. Ion milling equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16102384U JPS6176675U (en) | 1984-10-26 | 1984-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16102384U JPS6176675U (en) | 1984-10-26 | 1984-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176675U true JPS6176675U (en) | 1986-05-23 |
Family
ID=30718936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16102384U Pending JPS6176675U (en) | 1984-10-26 | 1984-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176675U (en) |
-
1984
- 1984-10-26 JP JP16102384U patent/JPS6176675U/ja active Pending
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