JPS59181573U - Sample chamber exhaust system in charged particle beam equipment - Google Patents
Sample chamber exhaust system in charged particle beam equipmentInfo
- Publication number
- JPS59181573U JPS59181573U JP7588683U JP7588683U JPS59181573U JP S59181573 U JPS59181573 U JP S59181573U JP 7588683 U JP7588683 U JP 7588683U JP 7588683 U JP7588683 U JP 7588683U JP S59181573 U JPS59181573 U JP S59181573U
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- particle beam
- charged particle
- exhaust system
- chamber exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案の一実施例装置を示す構成略図である。
１・・・・・・試料室、２・・・・・・試料、３・・・
・・・２次電子検出器、４．５・・・・・・盲蓋、６・
・・・・・真空ポンプ、ｊ・・・・・・電源、８・・・
・・・光検出器、９・・・・・・判別回路。The drawing is a schematic diagram showing the structure of an embodiment of the present invention. 1...sample chamber, 2...sample, 3...
...Secondary electron detector, 4.5...Blind lid, 6.
...Vacuum pump, j...Power supply, 8...
...Photodetector, 9...Discrimination circuit.
Claims (1)
室内に設けられた光を検出する光検出器と、該光検出器
よりの信号を判別する判別回路と、該判別回路よりの信
号によって前記試料室内を排気する真空ポンプを制御す
る手段を備えたことを特徴とする荷電粒子線装置におけ
る試料室排気装置。A sample chamber that stores a sample to be irradiated with charged particles, a photodetector that detects light provided in the sample chamber, a discrimination circuit that discriminates a signal from the photodetector, and a signal from the discrimination circuit. A sample chamber evacuation device in a charged particle beam apparatus, comprising means for controlling a vacuum pump for evacuating the sample chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7588683U JPS59181573U (en) | 1983-05-20 | 1983-05-20 | Sample chamber exhaust system in charged particle beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7588683U JPS59181573U (en) | 1983-05-20 | 1983-05-20 | Sample chamber exhaust system in charged particle beam equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59181573U true JPS59181573U (en) | 1984-12-04 |
Family
ID=30205946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7588683U Pending JPS59181573U (en) | 1983-05-20 | 1983-05-20 | Sample chamber exhaust system in charged particle beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59181573U (en) |
-
1983
- 1983-05-20 JP JP7588683U patent/JPS59181573U/en active Pending
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