JPS6170356U - - Google Patents

Info

Publication number
JPS6170356U
JPS6170356U JP15467284U JP15467284U JPS6170356U JP S6170356 U JPS6170356 U JP S6170356U JP 15467284 U JP15467284 U JP 15467284U JP 15467284 U JP15467284 U JP 15467284U JP S6170356 U JPS6170356 U JP S6170356U
Authority
JP
Japan
Prior art keywords
detector
power source
focusing electrode
electrode
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15467284U
Other languages
Japanese (ja)
Other versions
JPH0342622Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984154672U priority Critical patent/JPH0342622Y2/ja
Publication of JPS6170356U publication Critical patent/JPS6170356U/ja
Application granted granted Critical
Publication of JPH0342622Y2 publication Critical patent/JPH0342622Y2/ja
Expired legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図本考案の一実施例を示す構成図、第２図
は検出器の入射エネルギと検出効率の関係を表す
グラフ、第３図は従来装置の構成図である。 １：エネルギアナライザ、２：光電子、３：分
析用電源、４：掃引制御電源、５：出射スリツト
、６：電子線検出器、７：集束電極、８：検出用
加速電源、９：高圧電源。 FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a graph showing the relationship between incident energy of a detector and detection efficiency, and FIG. 3 is a block diagram of a conventional device. 1: Energy analyzer, 2: Photoelectron, 3: Power source for analysis, 4: Sweep control power source, 5: Output slit, 6: Electron beam detector, 7: Focusing electrode, 8: Accelerating power source for detection, 9: High voltage power source.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 対向して配置された一対の電極と、両電極間に
電界を生ぜしめるための電源と、前記電界中に導
かれ出射スリツトを通過した電子を検出するため
の検出器と、該スリツトを通過した電子を該検出
器に集束させるための集束電極と、該集束電極及
び前記電極にエネルギ掃引電圧を与えるための掃
引電源とを備えた装置において、前記集束電極と
検出器の間に一定の電圧を印加するための電源を
設けたことを特徴とするエネルギアナライザ。 A pair of electrodes arranged opposite to each other, a power source for generating an electric field between the two electrodes, a detector for detecting electrons guided into the electric field and passing through an emission slit, A device comprising a focusing electrode for focusing electrons on the detector, and a sweep power supply for applying an energy sweeping voltage to the focusing electrode and the electrode, wherein a constant voltage is applied between the focusing electrode and the detector. An energy analyzer characterized by being provided with a power source for applying voltage.
JP1984154672U 1984-10-13 1984-10-13 Expired JPH0342622Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984154672U JPH0342622Y2 (en) 1984-10-13 1984-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984154672U JPH0342622Y2 (en) 1984-10-13 1984-10-13

Publications (2)

Publication Number Publication Date
JPS6170356U true JPS6170356U (en) 1986-05-14
JPH0342622Y2 JPH0342622Y2 (en) 1991-09-06

Family

ID=30712664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984154672U Expired JPH0342622Y2 (en) 1984-10-13 1984-10-13

Country Status (1)

Country Link
JP (1) JPH0342622Y2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823157A (en) * 1981-07-31 1983-02-10 Shimadzu Corp Mass spectrograph
JPS58125353U (en) * 1982-02-19 1983-08-25 日本電子株式会社 Negative ion detection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823157A (en) * 1981-07-31 1983-02-10 Shimadzu Corp Mass spectrograph
JPS58125353U (en) * 1982-02-19 1983-08-25 日本電子株式会社 Negative ion detection device

Also Published As

Publication number Publication date
JPH0342622Y2 (en) 1991-09-06

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