JPS6174951U - - Google Patents

Info

Publication number
JPS6174951U
JPS6174951U JP15800684U JP15800684U JPS6174951U JP S6174951 U JPS6174951 U JP S6174951U JP 15800684 U JP15800684 U JP 15800684U JP 15800684 U JP15800684 U JP 15800684U JP S6174951 U JPS6174951 U JP S6174951U
Authority
JP
Japan
Prior art keywords
electrodes
detector
mesh
electron beam
shaped electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15800684U
Other languages
Japanese (ja)
Other versions
JPH0341402Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984158006U priority Critical patent/JPH0341402Y2/ja
Publication of JPS6174951U publication Critical patent/JPS6174951U/ja
Application granted granted Critical
Publication of JPH0341402Y2 publication Critical patent/JPH0341402Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図本考案の一実施例を示す構成図、第２図
は従来装置の構成図である。 １：エネルギアナライザ、２：光電子、３：分
析用電源、４：掃引制御電源、５：出射口、６：
チヤンネルプレート、７：メツシユ状電極、８：
電源、９：検出器用加速電源。 FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional device. 1: Energy analyzer, 2: Photoelectron, 3: Analysis power supply, 4: Sweep control power supply, 5: Output port, 6:
Channel plate, 7: mesh electrode, 8:
Power supply, 9: Acceleration power supply for the detector.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一対の半球面型電極と、該電極にエネルギ掃引
電圧を与えるための掃引電源と、該電極の出射口
を通過した電子を検出するための一次元的に配列
された多数の素子から成る電子線検出器と、前記
出射口と該電子線検出器との間に設けられ前記半
球面型電極間の電場の乱れを防止するためのメツ
シユ状電極とを備えた装置において、該メツシユ
状電極と該検出器との間に一定の電圧を印加する
電源を設けたことを特徴とするエネルギ分析装置
。 An electron beam consisting of a pair of hemispherical electrodes, a sweep power supply for applying an energy sweep voltage to the electrodes, and a number of one-dimensionally arranged elements for detecting the electrons that have passed through the emission aperture of the electrodes. In an apparatus comprising a detector and a mesh-shaped electrode provided between the emission aperture and the electron beam detector to prevent disturbance of the electric field between the hemispherical electrodes, the mesh-shaped electrode and the An energy analysis device characterized by being provided with a power source that applies a constant voltage between it and a detector.
JP1984158006U 1984-10-19 1984-10-19 Expired JPH0341402Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984158006U JPH0341402Y2 (en) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984158006U JPH0341402Y2 (en) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6174951U true JPS6174951U (en) 1986-05-21
JPH0341402Y2 JPH0341402Y2 (en) 1991-08-30

Family

ID=30715992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984158006U Expired JPH0341402Y2 (en) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPH0341402Y2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823157A (en) * 1981-07-31 1983-02-10 Shimadzu Corp Mass spectrograph
JPS58120558U (en) * 1982-02-10 1983-08-17 日本電子株式会社 Negative ion detection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823157A (en) * 1981-07-31 1983-02-10 Shimadzu Corp Mass spectrograph
JPS58120558U (en) * 1982-02-10 1983-08-17 日本電子株式会社 Negative ion detection device

Also Published As

Publication number Publication date
JPH0341402Y2 (en) 1991-08-30

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