GB1387173A - Energy analyzer of the coaxial cylindrical type - Google Patents

Energy analyzer of the coaxial cylindrical type

Info

Publication number
GB1387173A
GB1387173A GB1329072A GB1329072A GB1387173A GB 1387173 A GB1387173 A GB 1387173A GB 1329072 A GB1329072 A GB 1329072A GB 1329072 A GB1329072 A GB 1329072A GB 1387173 A GB1387173 A GB 1387173A
Authority
GB
United Kingdom
Prior art keywords
slit
particles
detector
march
cylindrical type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1329072A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1387173A publication Critical patent/GB1387173A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1387173 Particle spectrometers HITACHI Ltd 22 March 1972 [22 March 1971] 13290/72 Heading HID An energy analyser for electrons or ions comprises cylindrical electrodes 81, 82, the latter having apertures 812, 813 for respectively admitting and releasing particles from the interelectrode space under the action of an electric field, a cylindrical incidence slit 85, an angledefining slit 86 and a detecting slit 87 through which particles from aperture 813 pass in order to reach a detector 88. In Fig. 8(a), the particles cross axis 84 prior to passing through slit 87 and thence, under the influence of a focusing electrode 811, to the detector 88. In Fig. 2 (not shown), the particles pass through the detecting slit from the exterior thereof and converge on a detector located on the axis of the instrument.
GB1329072A 1971-03-22 1972-03-22 Energy analyzer of the coaxial cylindrical type Expired GB1387173A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1629271 1971-03-22
US00237126A US3805057A (en) 1971-03-22 1972-03-22 Energy analyzer of coaxial cylindrical type

Publications (1)

Publication Number Publication Date
GB1387173A true GB1387173A (en) 1975-03-12

Family

ID=27614960

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1329072A Expired GB1387173A (en) 1971-03-22 1972-03-22 Energy analyzer of the coaxial cylindrical type

Country Status (2)

Country Link
US (1) US3805057A (en)
GB (1) GB1387173A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6762408B1 (en) 1999-06-16 2004-07-13 Shimadzu Research Laboratory (Europe) Ltd. Electrically-charged particle energy analyzers

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4100409A (en) * 1973-02-02 1978-07-11 U.S. Phillips Corporation Device for analyzing a surface layer by means of ion scattering
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
US4048498A (en) * 1976-09-01 1977-09-13 Physical Electronics Industries, Inc. Scanning auger microprobe with variable axial aperture
PL146420B1 (en) * 1983-10-14 1989-02-28 Politechnika Warszawska Method of producing an electron beam resulting in high current density over its target surface and electron gun therefor
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
DE59209914D1 (en) * 1991-12-02 2001-09-13 Unaxis Balzers Ag Process for filtering electrically charged particles, energy filter and analyzer with such an energy filter
AU1273192A (en) * 1992-02-17 1993-09-03 Dca Instruments Oy Method in the electron spectroscopy and an electron spectrometer
JP3757371B2 (en) * 1999-07-05 2006-03-22 日本電子株式会社 Energy filter and electron microscope using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6762408B1 (en) 1999-06-16 2004-07-13 Shimadzu Research Laboratory (Europe) Ltd. Electrically-charged particle energy analyzers

Also Published As

Publication number Publication date
US3805057A (en) 1974-04-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees