JPH0443899U - - Google Patents
Info
- Publication number
- JPH0443899U JPH0443899U JP8668090U JP8668090U JPH0443899U JP H0443899 U JPH0443899 U JP H0443899U JP 8668090 U JP8668090 U JP 8668090U JP 8668090 U JP8668090 U JP 8668090U JP H0443899 U JPH0443899 U JP H0443899U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- ion
- ion beam
- upstream
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 238000011144 upstream manufacturing Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
Description
第1図はこの考案の実施例を示す説明図である
。
図中、1……電極、2……絶縁物、3……サプ
レツサー電源、4……サプレツサー電極。
FIG. 1 is an explanatory diagram showing an embodiment of this invention. In the figure, 1... electrode, 2... insulator, 3... suppressor power supply, 4... suppressor electrode.
Claims (1)
数の電極を絶縁物を介して同軸状に一列に配置し
、イオンビームを上流側の電極より下流側の電極
方向に加速するイオン加速器において、上記複数
の電極の少なくとも1つに負電圧を印加して、そ
れをサプレツサー電極にするとともに、このサプ
レツサー電極より上流側に配置された電極をアー
ス接地したことを特徴とするイオン加速器。 In an ion accelerator in which a plurality of electrodes having a hole in the center through which the ion beam passes are arranged coaxially in a row via an insulator, and the ion beam is accelerated from the upstream electrode toward the downstream electrode, An ion accelerator characterized in that a negative voltage is applied to at least one of the electrodes to make it a suppressor electrode, and an electrode arranged upstream of the suppressor electrode is grounded.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8668090U JPH0443899U (en) | 1990-08-19 | 1990-08-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8668090U JPH0443899U (en) | 1990-08-19 | 1990-08-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0443899U true JPH0443899U (en) | 1992-04-14 |
Family
ID=31636291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8668090U Pending JPH0443899U (en) | 1990-08-19 | 1990-08-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0443899U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0447300U (en) * | 1990-08-29 | 1992-04-22 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63301498A (en) * | 1987-05-30 | 1988-12-08 | Ulvac Corp | High-voltage large-current ion beam accelerator |
-
1990
- 1990-08-19 JP JP8668090U patent/JPH0443899U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63301498A (en) * | 1987-05-30 | 1988-12-08 | Ulvac Corp | High-voltage large-current ion beam accelerator |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0447300U (en) * | 1990-08-29 | 1992-04-22 |
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