JPH0198469U - - Google Patents
Info
- Publication number
- JPH0198469U JPH0198469U JP19559487U JP19559487U JPH0198469U JP H0198469 U JPH0198469 U JP H0198469U JP 19559487 U JP19559487 U JP 19559487U JP 19559487 U JP19559487 U JP 19559487U JP H0198469 U JPH0198469 U JP H0198469U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- arc chamber
- source head
- filament
- cooling jacket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 4
- 239000002826 coolant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例を説明するためのイ
オンソースヘツドの縦断面図、第２図は従来の一
例を説明するためのイオンソースヘツドの縦断面
図、第３図は従来の他の例を説明するためのイオ
ンソースヘツドの縦断面図である。
１……アークチヤンバー、２……冷却ジヤケツ
ト、３……冷媒入口循環配管、４……冷媒出口循
環配管、５……イオンソースベース、６……フイ
ラメント、７……フイラメントインサータ、８…
…フイラメントインシユレーター、９……フイラ
メント電流導体、１０……フイラメント電流導体
インシユレーターＡ、１１……フイラメント電流
導体インシユレーターＢ、１２……フイラメント
電流端子、１３……フイラメント電流端子押え、
１４……アークチヤンバーサポート、１５……ベ
ーパーライザーガス導入口、１６……冷却用別配
管。
FIG. 1 is a vertical cross-sectional view of an ion source head for explaining one embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of an ion source head for explaining a conventional example, and FIG. FIG. 3 is a longitudinal cross-sectional view of an ion source head for explaining an example of the present invention. DESCRIPTION OF SYMBOLS 1...Arc chamber, 2...Cooling jacket, 3...Refrigerant inlet circulation piping, 4...Refrigerant outlet circulation piping, 5...Ion source base, 6...Filament, 7...Filament inserter, 8...
... filament insulator, 9... filament current conductor, 10... filament current conductor insulator A, 11... filament current conductor insulator B, 12... filament current terminal, 13... filament current terminal holder,
14...Arc chamber support, 15...Vaporizer gas inlet, 16...Separate piping for cooling.
Claims (1)
イオンソースヘツドにおいて、イオンを加熱する
ためのフイラメントを有するアークチヤンバー部
分の軸方向に接触した冷却ジヤケツトと、この冷
却ジヤケツトに連結された冷媒循環配管とを備え
、前記アークチヤンバーを高真空に保つたまま強
制冷却することを特徴とする強制冷却機構付イオ
ンソースヘツド。 In a Freeman type ion source head used in an ion implanter, there is a cooling jacket in axial contact with an arc chamber portion having a filament for heating ions, and a coolant circulation pipe connected to this cooling jacket. An ion source head with a forced cooling mechanism, characterized in that the arc chamber is forcibly cooled while being kept in a high vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19559487U JPH0198469U (en) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19559487U JPH0198469U (en) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198469U true JPH0198469U (en) | 1989-06-30 |
Family
ID=31486266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19559487U Pending JPH0198469U (en) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198469U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (en) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | Ion source device |
-
1987
- 1987-12-22 JP JP19559487U patent/JPH0198469U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (en) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | Ion source device |
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