JPS6183248U - - Google Patents
Info
- Publication number
- JPS6183248U JPS6183248U JP16837184U JP16837184U JPS6183248U JP S6183248 U JPS6183248 U JP S6183248U JP 16837184 U JP16837184 U JP 16837184U JP 16837184 U JP16837184 U JP 16837184U JP S6183248 U JPS6183248 U JP S6183248U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- refrigerant
- sample holder
- supply pipe
- supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims 6
- 238000002955 isolation Methods 0.000 claims 1
- 238000001073 sample cooling Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す縦断面図、第
２図はそのＡＡ断面図である。
１：鏡体、２：対物レンズ、３：試料ホルダ、
４：ゴニオメータ、５：開口、６：熱絶縁物、７
：試料、８：試料台、９：熱伝導体、１０：伝導
板、１１：回収パイプ、１２：供給パイプ、１３
，１５，１８：金属ベローズ、１４，１６：パイ
プ、１７：ケース、１９：リング、２０：Ｏリン
グパツキング、２１：アーム、２２：キー。
FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA. 1: Mirror body, 2: Objective lens, 3: Sample holder,
4: Goniometer, 5: Aperture, 6: Thermal insulation, 7
: Sample, 8: Sample stage, 9: Heat conductor, 10: Conductive plate, 11: Recovery pipe, 12: Supply pipe, 13
, 15, 18: metal bellows, 14, 16: pipe, 17: case, 19: ring, 20: O-ring packing, 21: arm, 22: key.
Claims (1)
と、該試料ホルダ内に熱的に遮断された状態で取
付けられ、試料を保持した試料台と、該試料台の
一部を兼用して形成された、又は該試料台と熱的
に接続されて一体化されこ熱伝導体と、該熱伝導
体部に冷媒を供給するための供給パイプと、該供
給された冷媒の気化ガスを排出するための前記熱
伝導体に固定された排出パイプと、前記供給パイ
プに冷媒を送り込むための冷媒供給源と、前記試
料ホルダ内に連通され、且つ前記供給及び排出パ
イプを囲繞することにより各パイプを真空遮断す
るための鏡体に固定されたケースとを備え、前記
試料ホルダとケースとの連結は耐真空的にシール
された状態で回転可能となし、前記供給及び排出
パイプの途中に軸心が前記試料ホルダの軸心と略
交叉するように置かれた金属ベローズを夫々設け
てなる電子顕微鏡等における試料冷却装置。 A cylindrical sample holder rotatably attached to a mirror body, a sample stand attached in a thermally insulated state inside the sample holder and holding a sample, and a part of the sample stand also used. A heat conductor formed or thermally connected and integrated with the sample stage, a supply pipe for supplying a refrigerant to the heat conductor section, and a vaporized gas of the supplied refrigerant being discharged. a refrigerant supply source for feeding refrigerant into the supply pipe; and a refrigerant supply source for supplying refrigerant to the supply pipe; and a case fixed to a mirror body for vacuum isolation, the connection between the sample holder and the case is rotatable in a vacuum-proof sealed state, and an axial center is provided in the middle of the supply and discharge pipes. A sample cooling device for an electron microscope, etc., comprising metal bellows placed so as to substantially intersect with the axis of the sample holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16837184U JPS6183248U (en) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16837184U JPS6183248U (en) | 1984-11-06 | 1984-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183248U true JPS6183248U (en) | 1986-06-02 |
Family
ID=30726144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16837184U Pending JPS6183248U (en) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183248U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010061990A (en) * | 2008-09-03 | 2010-03-18 | Japan Science & Technology Agency | Sample holder for electron microscope |
| JP2020004509A (en) * | 2018-06-25 | 2020-01-09 | 株式会社メルビル | Sample holder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS452411Y1 (en) * | 1966-03-04 | 1970-01-31 |
-
1984
- 1984-11-06 JP JP16837184U patent/JPS6183248U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS452411Y1 (en) * | 1966-03-04 | 1970-01-31 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010061990A (en) * | 2008-09-03 | 2010-03-18 | Japan Science & Technology Agency | Sample holder for electron microscope |
| JP2020004509A (en) * | 2018-06-25 | 2020-01-09 | 株式会社メルビル | Sample holder |
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