JPS6237155U - - Google Patents

Info

Publication number
JPS6237155U
JPS6237155U JP12876085U JP12876085U JPS6237155U JP S6237155 U JPS6237155 U JP S6237155U JP 12876085 U JP12876085 U JP 12876085U JP 12876085 U JP12876085 U JP 12876085U JP S6237155 U JPS6237155 U JP S6237155U
Authority
JP
Japan
Prior art keywords
tank
outer tank
supported
vacuum equipment
inner tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12876085U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12876085U priority Critical patent/JPS6237155U/ja
Publication of JPS6237155U publication Critical patent/JPS6237155U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

添付図面は本考案の一実施例を示す断面図であ
る。 １：鏡体、２：外槽、３，８：ビス、４：穴、
５：凸部、６：上蓋、７，１５：Ｏリングパツキ
ング、９：突出部、１０：内槽、１１：冷媒、１
２：注入口、１３：ネジ、１４：皿バネ、１６：
熱伝導体、１７：反射板、１８：サーミスタ、１
９：リード線、２０：絶縁端子、２１：温度制御
回路、２２：栓。 The accompanying drawings are cross-sectional views showing one embodiment of the present invention. 1: Mirror body, 2: Outer tank, 3, 8: Screw, 4: Hole,
5: Convex portion, 6: Upper lid, 7, 15: O-ring packing, 9: Protruding portion, 10: Inner tank, 11: Refrigerant, 1
2: Inlet, 13: Screw, 14: Belleville spring, 16:
Thermal conductor, 17: Reflector, 18: Thermistor, 1
9: Lead wire, 20: Insulated terminal, 21: Temperature control circuit, 22: Plug.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空装置の内部に連通するようにこの真空装置
外壁に固定された外槽と、該外槽内に置かれかつ
外槽の上部に熱伝導を非常に小さくした状態で吊
り下げるように支持された内槽と、該内槽内に導
入された冷媒と、前記内槽と前記真空装置内に置
かれた被冷却部とを熱的に接続するための熱伝導
体とを備えた装置において、内槽の底部をバネを
介して外槽に引張つた状態で支持してなる電子顕
微鏡等に使用される冷却槽。 An outer tank is fixed to the outer wall of the vacuum equipment so as to communicate with the inside of the vacuum equipment, and an outer tank is placed within the outer tank and supported so as to be suspended from the upper part of the outer tank with extremely low heat conduction. An apparatus comprising an inner tank, a refrigerant introduced into the inner tank, and a heat conductor for thermally connecting the inner tank and a cooled part placed in the vacuum apparatus, A cooling tank used in electron microscopes, etc., in which the bottom of the tank is supported in a tensioned state by an outer tank via a spring.
JP12876085U 1985-08-23 1985-08-23 Pending JPS6237155U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12876085U JPS6237155U (en) 1985-08-23 1985-08-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12876085U JPS6237155U (en) 1985-08-23 1985-08-23

Publications (1)

Publication Number Publication Date
JPS6237155U true JPS6237155U (en) 1987-03-05

Family

ID=31024714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12876085U Pending JPS6237155U (en) 1985-08-23 1985-08-23

Country Status (1)

Country Link
JP (1) JPS6237155U (en)

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