JPS63185077U - - Google Patents
Info
- Publication number
- JPS63185077U JPS63185077U JP7599387U JP7599387U JPS63185077U JP S63185077 U JPS63185077 U JP S63185077U JP 7599387 U JP7599387 U JP 7599387U JP 7599387 U JP7599387 U JP 7599387U JP S63185077 U JPS63185077 U JP S63185077U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- liquid
- vacuum processing
- vacuum
- cooling mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001073 sample cooling Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000009834 vaporization Methods 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 239000000110 cooling liquid Substances 0.000 description 1
Description
第１図は本考案の一実施例である真空処理装置
の試料冷却機構を示す縦断面図である。
１…真空室、２…真空排気装置、３…ガス供給
装置、４…試料台、５…試料、６…クランプ、７
…冷却液供給装置。
FIG. 1 is a longitudinal sectional view showing a sample cooling mechanism of a vacuum processing apparatus which is an embodiment of the present invention. 1...Vacuum chamber, 2...Evacuation device, 3...Gas supply device, 4...Sample stage, 5...Sample, 6...Clamp, 7
...Cooling liquid supply device.
Claims (1)
の低い液体を供給し、真空中で該液体が蒸発する
気化熱を利用して前記試料を冷却することを特徴
とする真空処理装置の試料冷却機構。 ２ 前記液体の気化したガスを真空処理に用いる
実用新案登録請求の範囲第１項記載の真空処理装
置の試料冷却機構。[Claims for Utility Model Registration] 1. Supplying a liquid with low vapor pressure between a sample and a sample stage supporting the sample, and cooling the sample using the heat of vaporization of the liquid in a vacuum. A sample cooling mechanism for vacuum processing equipment featuring: 2. A sample cooling mechanism for a vacuum processing apparatus according to claim 1, which uses the vaporized gas of the liquid for vacuum processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7599387U JPS63185077U (en) | 1987-05-22 | 1987-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7599387U JPS63185077U (en) | 1987-05-22 | 1987-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63185077U true JPS63185077U (en) | 1988-11-28 |
Family
ID=30922658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7599387U Pending JPS63185077U (en) | 1987-05-22 | 1987-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63185077U (en) |
-
1987
- 1987-05-22 JP JP7599387U patent/JPS63185077U/ja active Pending
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