JPS61164027U - - Google Patents
Info
- Publication number
- JPS61164027U JPS61164027U JP4688685U JP4688685U JPS61164027U JP S61164027 U JPS61164027 U JP S61164027U JP 4688685 U JP4688685 U JP 4688685U JP 4688685 U JP4688685 U JP 4688685U JP S61164027 U JPS61164027 U JP S61164027U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- gas supply
- nozzle
- gas
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例である半導体製造装
置を示す構成図、第２図は第１図のＡ部の詳細図
、第３図は第１図の他の実施例であるＡ部の詳細
図である。
１……処理室、６……真空ポンプ、７……供給
ライン、１２ないし１４……流量制御ユニツト、
１５……ノズル。
FIG. 1 is a configuration diagram showing a semiconductor manufacturing apparatus that is an embodiment of the present invention, FIG. 2 is a detailed view of section A in FIG. 1, and FIG. 3 is a section A that is another embodiment of the invention. FIG. 1... Processing chamber, 6... Vacuum pump, 7... Supply line, 12 to 14... Flow rate control unit,
15... Nozzle.
Claims (1)
排気手段と、前記処理室にプロセスガスを供給す
るガス供給手段とから成る半導体製造装置におい
て、前記ガス供給手段のガス供給ラインの処理室
側にノズルを設け、該ノズル部に蒸気圧の低いガ
スラインを接続したことを特徴とする半導体製造
装置。 In a semiconductor manufacturing apparatus comprising a processing chamber, an exhaust means for evacuating the processing chamber and controlling the pressure, and a gas supply means for supplying process gas to the processing chamber, a gas supply line of the gas supply means on the processing chamber side 1. A semiconductor manufacturing apparatus comprising: a nozzle; and a gas line having a low vapor pressure connected to the nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4688685U JPS61164027U (en) | 1985-04-01 | 1985-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4688685U JPS61164027U (en) | 1985-04-01 | 1985-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164027U true JPS61164027U (en) | 1986-10-11 |
Family
ID=30561702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4688685U Pending JPS61164027U (en) | 1985-04-01 | 1985-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164027U (en) |
-
1985
- 1985-04-01 JP JP4688685U patent/JPS61164027U/ja active Pending