JPS6391156U - - Google Patents
Info
- Publication number
- JPS6391156U JPS6391156U JP18721386U JP18721386U JPS6391156U JP S6391156 U JPS6391156 U JP S6391156U JP 18721386 U JP18721386 U JP 18721386U JP 18721386 U JP18721386 U JP 18721386U JP S6391156 U JPS6391156 U JP S6391156U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- irradiating
- extracting
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Description
第１図は本考案の一実施例のイオン注入装置の
概略構成を示す側面図、第２図は同平面図、第３
図はウエハにイオンビームを注入する状態を示す
ウエハデイスクの正面図、第４図は同側面図であ
る。
１……イオン源部、２……質量分析電磁石、６
……ウエハ、ｂ……イオンビーム。
FIG. 1 is a side view showing a schematic configuration of an ion implantation apparatus according to an embodiment of the present invention, FIG. 2 is a plan view of the same, and FIG.
The figure is a front view of the wafer disk showing a state in which an ion beam is implanted into a wafer, and FIG. 4 is a side view of the same. 1...Ion source part, 2...Mass analysis electromagnet, 6
...Wafer, b...Ion beam.
Claims (1)
ン源部と、所望の質量のイオンビームを取り出す
質量分析電磁石と、前記イオンビームをウエハ側
に照射させる垂直および水平電極板とを備えたこ
とを特徴とするイオン注入装置。 It is characterized by comprising a plurality of ion source units each generating an ion beam, a mass analysis electromagnet for extracting an ion beam of a desired mass, and vertical and horizontal electrode plates for irradiating the ion beam onto the wafer side. Ion implanter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18721386U JPS6391156U (en) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18721386U JPS6391156U (en) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6391156U true JPS6391156U (en) | 1988-06-13 |
Family
ID=31137486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18721386U Pending JPS6391156U (en) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6391156U (en) |
-
1986
- 1986-12-04 JP JP18721386U patent/JPS6391156U/ja active Pending
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