JPS63110566U - - Google Patents
Info
- Publication number
- JPS63110566U JPS63110566U JP54687U JP54687U JPS63110566U JP S63110566 U JPS63110566 U JP S63110566U JP 54687 U JP54687 U JP 54687U JP 54687 U JP54687 U JP 54687U JP S63110566 U JPS63110566 U JP S63110566U
- Authority
- JP
- Japan
- Prior art keywords
- irradiated
- vacuum
- utility
- irradiation device
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Description
第１図は、この考案の一実施例を示す概略一部
断面図、第２図は第１図の要部拡大一部断面図で
ある。
１：真空容器、３：被照射物（基板）、４：ホ
ルダ、５：イオン源、８：分析手段、ＩＢ：面イ
オンビーム。
FIG. 1 is a schematic partial sectional view showing an embodiment of this invention, and FIG. 2 is an enlarged partial sectional view of the main part of FIG. 1: Vacuum vessel, 3: Irradiated object (substrate), 4: Holder, 5: Ion source, 8: Analysis means, IB: Plane ion beam.
Claims (1)
、被照射物に照射するイオン源と、前記被照射物
を保持するホルダ近傍に位置し、前記面イオンビ
ームの一部を取り込み、これを質量分析する分析
手段とを備えたことを特徴とするイオン照射装置
。 ２ 分析手段が配設されてある分析室の真空度を
、被照射物が位置する真空容器内のそれに比べて
高真空に保持してなる実用新案登録請求の範囲第
１項記載のイオン照射装置。[Claims for Utility Model Registration] 1. An ion source that extracts a planar ion beam from a porous extraction electrode and irradiates an object to be irradiated, and a part of the planar ion beam that is located near a holder that holds the object to be irradiated. An ion irradiation device characterized by comprising: analysis means for taking in and mass-analyzing the same. 2. The ion irradiation device according to claim 1 of the utility model registration, wherein the degree of vacuum in the analysis chamber in which the analysis means is installed is maintained at a higher vacuum than that in the vacuum container in which the object to be irradiated is located. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54687U JPS63110566U (en) | 1987-01-05 | 1987-01-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54687U JPS63110566U (en) | 1987-01-05 | 1987-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110566U true JPS63110566U (en) | 1988-07-15 |
Family
ID=30777613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54687U Pending JPS63110566U (en) | 1987-01-05 | 1987-01-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110566U (en) |
-
1987
- 1987-01-05 JP JP54687U patent/JPS63110566U/ja active Pending