JPS62188138U - - Google Patents
Info
- Publication number
- JPS62188138U JPS62188138U JP7528286U JP7528286U JPS62188138U JP S62188138 U JPS62188138 U JP S62188138U JP 7528286 U JP7528286 U JP 7528286U JP 7528286 U JP7528286 U JP 7528286U JP S62188138 U JPS62188138 U JP S62188138U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- vacuum vessel
- ion source
- supplied
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案の一実施例の説明図である。
１……ガス導入口、２……真空容器、３……イ
オン源、４……プラズマ生成室、５……イオンビ
ーム引き出し電極、６……基板、７……ガス排気
サポート。
FIG. 1 is an explanatory diagram of an embodiment of the present invention. 1...Gas inlet, 2...Vacuum container, 3...Ion source, 4...Plasma generation chamber, 5...Ion beam extraction electrode, 6...Substrate, 7...Gas exhaust support.
Claims (1)
ツチング装置において、真空容器に設けたガス導
入口により、イオン源のイオン生成用ガスを供給
することを特徴とするエツチング装置。 An ion beam etching apparatus comprising an ion source and a vacuum vessel, characterized in that an ion generating gas for the ion source is supplied through a gas inlet provided in the vacuum vessel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7528286U JPS62188138U (en) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7528286U JPS62188138U (en) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188138U true JPS62188138U (en) | 1987-11-30 |
Family
ID=30921275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7528286U Pending JPS62188138U (en) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188138U (en) |
-
1986
- 1986-05-21 JP JP7528286U patent/JPS62188138U/ja active Pending