JPS6231860U - - Google Patents
Info
- Publication number
- JPS6231860U JPS6231860U JP12439685U JP12439685U JPS6231860U JP S6231860 U JPS6231860 U JP S6231860U JP 12439685 U JP12439685 U JP 12439685U JP 12439685 U JP12439685 U JP 12439685U JP S6231860 U JPS6231860 U JP S6231860U
- Authority
- JP
- Japan
- Prior art keywords
- silicone rubber
- utility
- metal
- processing equipment
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002470 thermal conductor Substances 0.000 claims description 2
- 229920002379 silicone rubber Polymers 0.000 claims 2
- 239000004945 silicone rubber Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Description
図面は、イオン注入装置のウエハ回りの一例を
示す断面図である。
１……イオンビーム、２……デイスク、３……
ウエハ押え、４……ウエハ、５……熱伝導体。
The drawing is a cross-sectional view showing an example of the area around a wafer of an ion implantation apparatus. 1...Ion beam, 2...Disk, 3...
Wafer holder, 4...wafer, 5...thermal conductor.
Claims (1)
属を混合して成ることを特徴とするイオン処理装
置用熱伝導体。 A thermal conductor for ion processing equipment characterized by being made of silicone rubber mixed with a metal having higher thermal conductivity than silicone rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12439685U JPS6231860U (en) | 1985-08-12 | 1985-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12439685U JPS6231860U (en) | 1985-08-12 | 1985-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231860U true JPS6231860U (en) | 1987-02-25 |
Family
ID=31016369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12439685U Pending JPS6231860U (en) | 1985-08-12 | 1985-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231860U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02226018A (en) * | 1989-02-28 | 1990-09-07 | Kyowa Electron Instr Co Ltd | Apparatus for measuring wheel weight of vehicle |
| WO2002103781A1 (en) * | 2001-06-14 | 2002-12-27 | Tokyo Electron Limited | Wafer supporter |
-
1985
- 1985-08-12 JP JP12439685U patent/JPS6231860U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02226018A (en) * | 1989-02-28 | 1990-09-07 | Kyowa Electron Instr Co Ltd | Apparatus for measuring wheel weight of vehicle |
| WO2002103781A1 (en) * | 2001-06-14 | 2002-12-27 | Tokyo Electron Limited | Wafer supporter |