JPS61164040U - - Google Patents

Info

Publication number
JPS61164040U
JPS61164040U JP3244985U JP3244985U JPS61164040U JP S61164040 U JPS61164040 U JP S61164040U JP 3244985 U JP3244985 U JP 3244985U JP 3244985 U JP3244985 U JP 3244985U JP S61164040 U JPS61164040 U JP S61164040U
Authority
JP
Japan
Prior art keywords
wafer
hold
angle
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3244985U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3244985U priority Critical patent/JPS61164040U/ja
Publication of JPS61164040U publication Critical patent/JPS61164040U/ja
Pending legal-status Critical Current

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Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係るウエハーキヤリアーの構
成図、第２図は従来のウエハーキヤリアーの構成
図である。 符号の説明、１：キヤリアー、２：ウエハー、
３：キヤリアーの溝、１１：キヤリアー、１２：
ウエハー、１３：キヤリアーの溝。 FIG. 1 is a block diagram of a wafer carrier according to the present invention, and FIG. 2 is a block diagram of a conventional wafer carrier. Explanation of symbols, 1: carrier, 2: wafer,
3: Carrier groove, 11: Carrier, 12:
Wafer, 13: carrier groove.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハーを傾斜させて保持する構成としたこと
を特徴とするウエハーキヤリアー。 A wafer carrier characterized by being configured to hold a wafer at an angle.
JP3244985U 1985-03-06 1985-03-06 Pending JPS61164040U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3244985U JPS61164040U (en) 1985-03-06 1985-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3244985U JPS61164040U (en) 1985-03-06 1985-03-06

Publications (1)

Publication Number Publication Date
JPS61164040U true JPS61164040U (en) 1986-10-11

Family

ID=30533972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3244985U Pending JPS61164040U (en) 1985-03-06 1985-03-06

Country Status (1)

Country Link
JP (1) JPS61164040U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013008920A (en) * 2011-06-27 2013-01-10 Mitsubishi Electric Corp Wafer cassette
JPWO2015151377A1 (en) * 2014-03-31 2017-04-13 パナソニックＩｐマネジメント株式会社 Solar cell manufacturing method and substrate cassette used therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013008920A (en) * 2011-06-27 2013-01-10 Mitsubishi Electric Corp Wafer cassette
JPWO2015151377A1 (en) * 2014-03-31 2017-04-13 パナソニックＩｐマネジメント株式会社 Solar cell manufacturing method and substrate cassette used therefor

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