JPS62186360U - - Google Patents
Info
- Publication number
- JPS62186360U JPS62186360U JP7268186U JP7268186U JPS62186360U JP S62186360 U JPS62186360 U JP S62186360U JP 7268186 U JP7268186 U JP 7268186U JP 7268186 U JP7268186 U JP 7268186U JP S62186360 U JPS62186360 U JP S62186360U
- Authority
- JP
- Japan
- Prior art keywords
- electromagnet
- ion
- mass spectrometry
- ion sources
- isolation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004949 mass spectrometry Methods 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
Description
第１図はこの考案の一実施例の平断面図、第２
図は従来のイオン注入装置の平断面図である。
１，２……イオンソース、３……補助電磁石、
４……質量分析用電磁石。なお、各図中、同一符
号は同一又は相当部分を示す。
Figure 1 is a plan sectional view of one embodiment of this invention, Figure 2
The figure is a plan cross-sectional view of a conventional ion implanter. 1, 2...Ion source, 3...Auxiliary electromagnet,
4...Electromagnet for mass spectrometry. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
、質量分析用電磁石と、少なくとも１つの前記イ
オンソースが作るイオンビームのライン上であつ
て前記質量分析用電磁石の直前に設けられた補助
電磁石とを備えてなるイオン注入装置。 A plurality of ion sources that can operate in isolation from each other, a mass spectrometry electromagnet, and an auxiliary electromagnet provided on the line of the ion beam produced by at least one of the ion sources and immediately before the mass spectrometry electromagnet. Ion implantation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268186U JPS62186360U (en) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268186U JPS62186360U (en) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186360U true JPS62186360U (en) | 1987-11-27 |
Family
ID=30916347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268186U Pending JPS62186360U (en) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186360U (en) |
-
1986
- 1986-05-16 JP JP7268186U patent/JPS62186360U/ja active Pending