JPS6318746U - - Google Patents
Info
- Publication number
- JPS6318746U JPS6318746U JP11204886U JP11204886U JPS6318746U JP S6318746 U JPS6318746 U JP S6318746U JP 11204886 U JP11204886 U JP 11204886U JP 11204886 U JP11204886 U JP 11204886U JP S6318746 U JPS6318746 U JP S6318746U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ion source
- plasma chamber
- extracting ions
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、本考案の一実施例の原理図、第２図
は、イオン源の電極と被処理物の位置関係を示す
模式図である。
８……ビーム引出し孔。
FIG. 1 is a principle diagram of an embodiment of the present invention, and FIG. 2 is a schematic diagram showing the positional relationship between the electrodes of the ion source and the object to be processed. 8...Beam extraction hole.
Claims (1)
出す電極を備えたイオン源の、前記電極は、イオ
ンを引出すための孔を設けた複数の板から形成さ
れ、前記電極を構成する複数の前記板は概ね円筒
の一部をなすわん曲した形状としたことを特徴と
するイオン源の電極構造。 In an ion source comprising a plasma chamber and an electrode for extracting ions from the plasma chamber, the electrode is formed of a plurality of plates provided with holes for extracting ions, and the plurality of plates constituting the electrode are generally An electrode structure of an ion source characterized by having a curved shape forming part of a cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11204886U JPS6318746U (en) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11204886U JPS6318746U (en) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318746U true JPS6318746U (en) | 1988-02-06 |
Family
ID=30992551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11204886U Pending JPS6318746U (en) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318746U (en) |
-
1986
- 1986-07-23 JP JP11204886U patent/JPS6318746U/ja active Pending
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