JPH01120951U - - Google Patents
Info
- Publication number
- JPH01120951U JPH01120951U JP1420988U JP1420988U JPH01120951U JP H01120951 U JPH01120951 U JP H01120951U JP 1420988 U JP1420988 U JP 1420988U JP 1420988 U JP1420988 U JP 1420988U JP H01120951 U JPH01120951 U JP H01120951U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- exhaust pipe
- rotary pump
- potential part
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
Description
第１図は実施例に係る真空排気装置の要部を示
すものであり、Ａは側面図、Ｂはその線―に
沿う断面図である。第２図は、従来の真空排気装
置を用いたイオン注入装置を部分的に示す概略図
である。
４…高電位部、１６…真空排気ポンプ、１８…
排気ガス、２０ａ，２０ｂ…絶縁排気管、２２…
オイル溜め、２４ａ，２４ｂ…電極、２６…直流
電源。
FIG. 1 shows the main parts of the evacuation device according to the embodiment, and A is a side view and B is a sectional view taken along the line -. FIG. 2 is a schematic diagram partially showing an ion implantation device using a conventional vacuum evacuation device. 4... High potential section, 16... Vacuum pump, 18...
Exhaust gas, 20a, 20b...Insulated exhaust pipe, 22...
Oil reservoir, 24a, 24b... electrode, 26... DC power supply.
Claims (1)
位部に設け、そのロータリポンプからの排気ガス
を絶縁排気管を経由して大地電位部へ排出する構
造の真空排気装置において、前記絶縁排気管内に
１組の電極を相対向させて収納し、かつ絶縁排気
管の当該電極の下方に位置する部分にオイル溜め
を設け、そして電源から前記電極間に電圧を印加
するようにしたことを特徴とする真空排気装置。 In a vacuum evacuation device having a structure in which a vacuum evacuation pump having a rotary pump is provided in a high potential part and exhaust gas from the rotary pump is discharged to the earth potential part via an insulated exhaust pipe, a set of A vacuum exhaust device characterized in that electrodes are housed facing each other, an oil reservoir is provided in a portion of an insulated exhaust pipe located below the electrodes, and a voltage is applied between the electrodes from a power source. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1420988U JPH01120951U (en) | 1988-02-05 | 1988-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1420988U JPH01120951U (en) | 1988-02-05 | 1988-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120951U true JPH01120951U (en) | 1989-08-16 |
Family
ID=31225204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1420988U Pending JPH01120951U (en) | 1988-02-05 | 1988-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120951U (en) |
-
1988
- 1988-02-05 JP JP1420988U patent/JPH01120951U/ja active Pending