JPS5297786A - X-ray analyzer - Google Patents

X-ray analyzer

Info

Publication number
JPS5297786A
JPS5297786A JP1405476A JP1405476A JPS5297786A JP S5297786 A JPS5297786 A JP S5297786A JP 1405476 A JP1405476 A JP 1405476A JP 1405476 A JP1405476 A JP 1405476A JP S5297786 A JPS5297786 A JP S5297786A
Authority
JP
Japan
Prior art keywords
ray analyzer
electron
microfine
specimen
disposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1405476A
Other languages
Japanese (ja)
Inventor
Tadao Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1405476A priority Critical patent/JPS5297786A/en
Publication of JPS5297786A publication Critical patent/JPS5297786A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Abstract

PURPOSE:Microfine regions of a specimen may be X-ray detected and two-dimensional scanning of electron beams without distortion is made possible by disposing an electron beam deflector near the upper magnetic pole of an electron lens.
JP1405476A 1976-02-13 1976-02-13 X-ray analyzer Pending JPS5297786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1405476A JPS5297786A (en) 1976-02-13 1976-02-13 X-ray analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1405476A JPS5297786A (en) 1976-02-13 1976-02-13 X-ray analyzer

Publications (1)

Publication Number Publication Date
JPS5297786A true JPS5297786A (en) 1977-08-16

Family

ID=11850365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1405476A Pending JPS5297786A (en) 1976-02-13 1976-02-13 X-ray analyzer

Country Status (1)

Country Link
JP (1) JPS5297786A (en)

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